Ryan L. Burns

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Planarization of semiconductor devices
- Patent number 11,456,185
- Issue date Sep 27, 2022
- Tokyo Electron Limited
- Ryan Burns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Predicting across wafer spin-on planarization over a patterned topo...
- Patent number 11,455,436
- Issue date Sep 27, 2022
- Tokyo Electron Limited
- Ryan Burns
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method of planarization control using a cross-linkable m...
- Patent number 11,262,657
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Facilitation of spin-coat planarization over feature topography dur...
- Patent number 10,622,267
- Issue date Apr 14, 2020
- Tokyo Electron Limited
- Ryan L. Burns
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
PROVIDING A BARRIER LAYER FOR PHOTORESIST PROCESSING
- Publication number 20230259030
- Publication date Aug 17, 2023
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREDICTING ACROSS WAFER SPIN-ON PLANARIZATION OVER A PATTERNED TOPO...
- Publication number 20210303741
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Ryan Burns
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD OF PLANARIZATION CONTROL USING A CROSS-LINKABLE M...
- Publication number 20210018839
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLANARIZATION OF SEMICONDUCTOR DEVICES
- Publication number 20200395224
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Ryan Burns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACILITATION OF SPIN-COAT PLANARIZATION OVER FEATURE TOPOGRAPHY DUR...
- Publication number 20180096905
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Ryan L. Burns
- G06 - COMPUTING CALCULATING COUNTING