Ryo CHIBA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and method for manufacturing mounting s...
- Patent number 12,033,886
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and substrate processing apparatus
- Patent number 11,538,715
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Ryo Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,910,252
- Issue date Feb 2, 2021
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,388,558
- Issue date Aug 20, 2019
- Tokyo Electron Limited
- Yasuharu Sasaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200335384
- Publication date Oct 22, 2020
- TOKYO ELECTRON LIMITED
- Ryo CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190326153
- Publication date Oct 24, 2019
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR MANUFACTURING MOUNTING S...
- Publication number 20190267277
- Publication date Aug 29, 2019
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180158711
- Publication date Jun 7, 2018
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS