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Ryo ISHIMARU
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma etching method
Patent number
10,229,838
Issue date
Mar 12, 2019
Hitach High-Technologies Corporation
Ryo Ishimaru
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PLASMA ETCHING METHOD
Publication number
20180122651
Publication date
May 3, 2018
Hitachi High-Technologies Corporation
Ryo ISHIMARU
H01 - BASIC ELECTRIC ELEMENTS