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Ryo Kuwajima
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Yamanashi, JP
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last 30 patents
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Patent Grant
Etching method and etching apparatus
Patent number
11,335,567
Issue date
May 17, 2022
Tokyo Electron Limited
Naoki Shindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
7,771,536
Issue date
Aug 10, 2010
Tokyo Electron Limited
Takahiro Horiguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
6,432,208
Issue date
Aug 13, 2002
Tokyo Electron Limited
Satoru Kawakami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240249956
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Yohei NAKAGOMI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220319877
Publication date
Oct 6, 2022
TOKYO ELECTRON LIMITED
Naoki SHINDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING APPARATUS AND ETCHING METHOD
Publication number
20210090912
Publication date
Mar 25, 2021
TOKYO ELECTRON LIMITED
Naoki SHINDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20210090898
Publication date
Mar 25, 2021
TOKYO ELECTRON LIMITED
Naoki SHINDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS AND GAS INJECTION MEMBER
Publication number
20110283942
Publication date
Nov 24, 2011
TOKYO ELECTRON LIMITED
Teruo IWATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus
Publication number
20060057799
Publication date
Mar 16, 2006
TOKYO ELECTRON LIMITED
Takahiro Horiguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus
Publication number
20060048710
Publication date
Mar 9, 2006
TOKYO ELECTRON LIMITED
Takahiro Horiguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...