Ryo Kuwajima

Person

  • Yamanashi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Etching method and etching apparatus

    • Patent number 11,335,567
    • Issue date May 17, 2022
    • Tokyo Electron Limited
    • Naoki Shindo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus

    • Patent number 7,771,536
    • Issue date Aug 10, 2010
    • Tokyo Electron Limited
    • Takahiro Horiguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 6,432,208
    • Issue date Aug 13, 2002
    • Tokyo Electron Limited
    • Satoru Kawakami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS

    • Publication number 20240249956
    • Publication date Jul 25, 2024
    • TOKYO ELECTRON LIMITED
    • Yohei NAKAGOMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

    • Publication number 20220319877
    • Publication date Oct 6, 2022
    • TOKYO ELECTRON LIMITED
    • Naoki SHINDO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING APPARATUS AND ETCHING METHOD

    • Publication number 20210090912
    • Publication date Mar 25, 2021
    • TOKYO ELECTRON LIMITED
    • Naoki SHINDO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND ETCHING APPARATUS

    • Publication number 20210090898
    • Publication date Mar 25, 2021
    • TOKYO ELECTRON LIMITED
    • Naoki SHINDO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS AND GAS INJECTION MEMBER

    • Publication number 20110283942
    • Publication date Nov 24, 2011
    • TOKYO ELECTRON LIMITED
    • Teruo IWATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus

    • Publication number 20060057799
    • Publication date Mar 16, 2006
    • TOKYO ELECTRON LIMITED
    • Takahiro Horiguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate processing apparatus

    • Publication number 20060048710
    • Publication date Mar 9, 2006
    • TOKYO ELECTRON LIMITED
    • Takahiro Horiguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...