Ryo MATSUBARA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature control method and temperature control device
- Patent number 12,009,182
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Ryo Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 11,705,309
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Yasutaka Hama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20240112922
- Publication date Apr 4, 2024
- TOKYO ELECTRON LIMITED
- Ryo MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD AND TEMPERATURE CONTROL DEVICE
- Publication number 20220375728
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Ryo MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210175049
- Publication date Jun 10, 2021
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS