Ryo MIYAMA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma stability determination method and plasma processing apparatus
- Patent number 10,074,550
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Ryo Miyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for presetting tuner of plasma processing apparatus and plas...
- Patent number 9,659,752
- Issue date May 23, 2017
- Tokyo Electron Limited
- Ryo Miyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA STABILITY DETERMINING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20170229332
- Publication date Aug 10, 2017
- TOKYO ELECTRON LIMITED
- Ryo MIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING TRANSITION METAL FILM AND SUBSTRATE PROCESSING AP...
- Publication number 20170125261
- Publication date May 4, 2017
- TOKYO ELECTRON LIMITED
- Ryo MIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20170011886
- Publication date Jan 12, 2017
- TOKYO ELECTRON LIMITED
- Toshihisa NOZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRESETTING TUNER OF PLASMA PROCESSING APPARATUS AND PLAS...
- Publication number 20160211120
- Publication date Jul 21, 2016
- TOKYO ELECTRON LIMITED
- Ryo MIYAMA
- H01 - BASIC ELECTRIC ELEMENTS