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Ryo MURAKAMI
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Miyagi, JP
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Patents Grants
last 30 patents
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Patent Grant
Heating device and turbo molecular pump
Patent number
10,801,521
Issue date
Oct 13, 2020
Tokyo Electron Limited
Tsutomu Mochizuki
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
HEATING DEVICE AND TURBO MOLECULAR PUMP
Publication number
20170298958
Publication date
Oct 19, 2017
TOKYO ELECTRON LIMITED
Tsutomu MOCHIZUKI
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...