Ryo Nakagaki

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for measuring overlay and measuring apparatus, scanning elec...
- Patent number 10,783,625
- Issue date Sep 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classification apparatus and defect classification method
- Patent number 10,203,851
- Issue date Feb 12, 2019
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect observation method and defect observation device
- Patent number 9,811,897
- Issue date Nov 7, 2017
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring overlay and measuring apparatus, scanning elec...
- Patent number 9,799,112
- Issue date Oct 24, 2017
- Hitachi High-Technologies Corporation
- Minoru Harada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged-particle radiation apparatus
- Patent number 9,685,301
- Issue date Jun 20, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect analysis assistance device, program executed by defect analy...
- Patent number 9,582,875
- Issue date Feb 28, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation method and defect observation device
- Patent number 9,569,836
- Issue date Feb 14, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classification method, and defect classification system
- Patent number 9,401,015
- Issue date Jul 26, 2016
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for testing defect using SEM
- Patent number 9,390,490
- Issue date Jul 12, 2016
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for reviewing defect
- Patent number 9,342,879
- Issue date May 17, 2016
- Hitachi Hich-Technologies Corporation
- Yohei Minekawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Region-of-interest determination apparatus, observation tool or ins...
- Patent number 9,335,277
- Issue date May 10, 2016
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and device therefor
- Patent number 9,311,697
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation method and device using SEM
- Patent number 9,082,585
- Issue date Jul 14, 2015
- Hitachi High-Technologies Corporation
- Go Kotaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,040,937
- Issue date May 26, 2015
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation method and defect observation device
- Patent number 8,824,773
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,731,275
- Issue date May 20, 2014
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Defect observation method and defect observation apparatus
- Patent number 8,634,634
- Issue date Jan 21, 2014
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects of semiconductor device
- Patent number 8,581,976
- Issue date Nov 12, 2013
- Hitachi High-Technologies Corporation
- Masaki Kurihara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect review method and apparatus
- Patent number 8,526,710
- Issue date Sep 3, 2013
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classifier using classification recipe based on connection b...
- Patent number 8,452,076
- Issue date May 28, 2013
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspecting method, inspecting system, and method for manufacturing...
- Patent number 8,428,336
- Issue date Apr 23, 2013
- Hitachi, Ltd.
- Yoko Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,355,559
- Issue date Jan 15, 2013
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Defect classifier using classification recipe based on connection b...
- Patent number 8,150,141
- Issue date Apr 3, 2012
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and its apparatus for reviewing defects
- Patent number 8,121,397
- Issue date Feb 21, 2012
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,090,190
- Issue date Jan 3, 2012
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classifier using classification recipe based on connection b...
- Patent number 7,991,217
- Issue date Aug 2, 2011
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for observing a specimen using a scanning electro...
- Patent number 7,932,493
- Issue date Apr 26, 2011
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects of semiconductor device
- Patent number 7,873,202
- Issue date Jan 18, 2011
- Hitachi High-Technologies Corporation
- Masaki Kurihara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope and system for inspecting semiconducto...
- Patent number 7,834,317
- Issue date Nov 16, 2010
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 7,657,078
- Issue date Feb 2, 2010
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...
- Publication number 20180025482
- Publication date Jan 25, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE
- Publication number 20150332445
- Publication date Nov 19, 2015
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Observation Method and Defect Observation Device
- Publication number 20150302568
- Publication date Oct 22, 2015
- Hitachi High-Technologies Corporation
- Takehiro HIRAI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged-Particle Radiation Apparatus
- Publication number 20150279614
- Publication date Oct 1, 2015
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT ANALYSIS ASSISTANCE DEVICE, PROGRAM EXECUTED BY DEFECT ANALY...
- Publication number 20150139531
- Publication date May 21, 2015
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150060667
- Publication date Mar 5, 2015
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...
- Publication number 20140375793
- Publication date Dec 25, 2014
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GUI, CLASSIFICATION APPARATUS, CLASSIFICATION METHOD, PROGRAM, AND...
- Publication number 20140331173
- Publication date Nov 6, 2014
- Yohei Minekawa
- G02 - OPTICS
Information Patent Application
Method and Apparatus for Reviewing Defect
- Publication number 20140219546
- Publication date Aug 7, 2014
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
REGION-OF-INTEREST DETERMINATION APPARATUS, OBSERVATION TOOL OR INS...
- Publication number 20140198975
- Publication date Jul 17, 2014
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G01 - MEASURING TESTING
Information Patent Application
RECIPE GENERATION APPARATUS, INSPECTION SUPPORT APPARATUS, INSPECTI...
- Publication number 20140177940
- Publication date Jun 26, 2014
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM
- Publication number 20140072204
- Publication date Mar 13, 2014
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Application
DEFECT REVIEW METHOD AND APPARATUS
- Publication number 20140037188
- Publication date Feb 6, 2014
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE CLASSIFICATION METHOD AND IMAGE CLASSIFICATION APPARATUS
- Publication number 20130294680
- Publication date Nov 7, 2013
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Application
DEFECT CLASSIFICATION SYSTEM AND DEFECT CLASSIFICATION DEVICE AND I...
- Publication number 20130222574
- Publication date Aug 29, 2013
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE
- Publication number 20130140457
- Publication date Jun 6, 2013
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECTS
- Publication number 20130114881
- Publication date May 9, 2013
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD AND DEVICE THEREFOR
- Publication number 20130108147
- Publication date May 2, 2013
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR TESTING DEFECT USING SEM
- Publication number 20130070078
- Publication date Mar 21, 2013
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DEFECT INSPECTION AND APPARATUS FOR DEFECT INSPECTION
- Publication number 20120257041
- Publication date Oct 11, 2012
- Ryo Nakagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT CLASSIFIER USING CLASSIFICATION RECIPE BASED ON CONNECTION B...
- Publication number 20120128233
- Publication date May 24, 2012
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION APPARATUS
- Publication number 20110299760
- Publication date Dec 8, 2011
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEVICE USING SEM
- Publication number 20110285839
- Publication date Nov 24, 2011
- Hitachi High-Technologies Corporation
- Go Kotaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT CLASSIFIER USING CLASSIFICATION RECIPE BASED ON CONNECTION B...
- Publication number 20110268345
- Publication date Nov 3, 2011
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD
- Publication number 20110261190
- Publication date Oct 27, 2011
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and Apparatus For Reviewing Defects of Semiconductor Device
- Publication number 20110102573
- Publication date May 5, 2011
- Masaki Kurihara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECTS
- Publication number 20100128970
- Publication date May 27, 2010
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECTS
- Publication number 20090268959
- Publication date Oct 29, 2009
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND ITS APPARATUS FOR REVIEWING DEFECTS
- Publication number 20090252403
- Publication date Oct 8, 2009
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect review method and apparatus
- Publication number 20090136121
- Publication date May 28, 2009
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING

Ryo Nakagaki

Person

Patents Grantslast 30 patents

Method for measuring overlay and measuring apparatus, scanning elec...

Defect classification apparatus and defect classification method

Defect observation method and defect observation device

Method for measuring overlay and measuring apparatus, scanning elec...

Charged-particle radiation apparatus

Defect analysis assistance device, program executed by defect analy...

Defect observation method and defect observation device

Defect classification method, and defect classification system

Method and device for testing defect using SEM

Method and apparatus for reviewing defect

Region-of-interest determination apparatus, observation tool or ins...

Inspection method and device therefor

Defect observation method and device using SEM

Charged particle beam apparatus

Defect observation method and defect observation device

Method and apparatus for reviewing defects

Defect observation method and defect observation apparatus

Method and apparatus for reviewing defects of semiconductor device

Defect review method and apparatus

Defect classifier using classification recipe based on connection b...

Inspecting method, inspecting system, and method for manufacturing...

Method and apparatus for reviewing defects

Defect classifier using classification recipe based on connection b...

Method and its apparatus for reviewing defects

Method and apparatus for reviewing defects

Defect classifier using classification recipe based on connection b...

Method and system for observing a specimen using a scanning electro...

Method and apparatus for reviewing defects of semiconductor device

Scanning electron microscope and system for inspecting semiconducto...

Method and apparatus for reviewing defects

Patents Applicationslast 30 patents

METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...

DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE

Defect Observation Method and Defect Observation Device

Charged-Particle Radiation Apparatus

DEFECT ANALYSIS ASSISTANCE DEVICE, PROGRAM EXECUTED BY DEFECT ANALY...

CHARGED PARTICLE BEAM APPARATUS

METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...

GUI, CLASSIFICATION APPARATUS, CLASSIFICATION METHOD, PROGRAM, AND...

Method and Apparatus for Reviewing Defect

REGION-OF-INTEREST DETERMINATION APPARATUS, OBSERVATION TOOL OR INS...

RECIPE GENERATION APPARATUS, INSPECTION SUPPORT APPARATUS, INSPECTI...

DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM

DEFECT REVIEW METHOD AND APPARATUS

IMAGE CLASSIFICATION METHOD AND IMAGE CLASSIFICATION APPARATUS

DEFECT CLASSIFICATION SYSTEM AND DEFECT CLASSIFICATION DEVICE AND I...

DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE

METHOD AND APPARATUS FOR REVIEWING DEFECTS

INSPECTION METHOD AND DEVICE THEREFOR

METHOD AND DEVICE FOR TESTING DEFECT USING SEM

METHOD FOR DEFECT INSPECTION AND APPARATUS FOR DEFECT INSPECTION

DEFECT CLASSIFIER USING CLASSIFICATION RECIPE BASED ON CONNECTION B...

DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION APPARATUS

DEFECT OBSERVATION METHOD AND DEVICE USING SEM

DEFECT CLASSIFIER USING CLASSIFICATION RECIPE BASED ON CONNECTION B...

DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD

Method and Apparatus For Reviewing Defects of Semiconductor Device

METHOD AND APPARATUS FOR REVIEWING DEFECTS

METHOD AND APPARATUS FOR REVIEWING DEFECTS

METHOD AND ITS APPARATUS FOR REVIEWING DEFECTS

Defect review method and apparatus