Ryo Nawata

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Motion control apparatus, lithography apparatus, planarization appa...
- Patent number 12,147,164
- Issue date Nov 19, 2024
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Feedback control device that suppresses disturbance vibration using...
- Patent number 11,815,861
- Issue date Nov 14, 2023
- Canon Kabushiki Kaisha
- Ryo Nawata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Imprinting apparatus, imprinting method, method for producing artic...
- Patent number 11,714,352
- Issue date Aug 1, 2023
- Canon Kabushiki Kaisha
- Ryo Nawata
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 11,584,063
- Issue date Feb 21, 2023
- Canon Kabushiki Kaisha
- Ryo Nawata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint method and method for manufacturing article
- Patent number 11,498,260
- Issue date Nov 15, 2022
- Canon Kabushiki Kaisha
- Ryo Nawata
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Vibration control apparatus, lithography apparatus, and method of m...
- Patent number 10,209,633
- Issue date Feb 19, 2019
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration reduction apparatus, lithography apparatus and method of...
- Patent number 9,671,704
- Issue date Jun 6, 2017
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration reduction apparatus, lithography apparatus, and method of...
- Patent number 9,665,108
- Issue date May 30, 2017
- Canon Kabushiki Kaisha
- Ryo Nawata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vibration control apparatus, lithography apparatus, and article man...
- Patent number 9,599,185
- Issue date Mar 21, 2017
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration control apparatus, lithography apparatus, and method of m...
- Patent number 9,052,614
- Issue date Jun 9, 2015
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element positioning apparatus, projection optical system an...
- Patent number 7,948,695
- Issue date May 24, 2011
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Grant
Optical element positioning apparatus, projection optical system an...
- Patent number 7,821,726
- Issue date Oct 26, 2010
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 7,733,462
- Issue date Jun 8, 2010
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,643,150
- Issue date Jan 5, 2010
- Canon Kabushiki Kaisha
- Ryo Nawata
- G01 - MEASURING TESTING
Information Patent Grant
Technique for positioning optical system element
- Patent number 7,589,911
- Issue date Sep 15, 2009
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Grant
Positioning apparatus, exposure apparatus, and method for producing...
- Patent number 7,221,463
- Issue date May 22, 2007
- Canon Kabushiki Kaisha
- Makoto Mizuno
- G02 - OPTICS
Information Patent Grant
Positioning device, exposure apparatus using the positioning device...
- Patent number 7,133,115
- Issue date Nov 7, 2006
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CONTROL DEVICE, CONTROL METHOD, STORAGE MEDIUM, AND ARTICLE MANUFAC...
- Publication number 20240310809
- Publication date Sep 19, 2024
- Canon Kabushiki Kaisha
- RYO NAWATA
- G05 - CONTROLLING REGULATING
Information Patent Application
FEEDBACK CONTROL DEVICE THAT SUPPRESSES DISTURBANCE VIBRATION USING...
- Publication number 20240036531
- Publication date Feb 1, 2024
- Canon Kabushiki Kaisha
- Ryo Nawata
- G05 - CONTROLLING REGULATING
Information Patent Application
MANAGEMENT APPARATUS, PROCESSING SYSTEM, MANAGEMENT METHOD, AND ART...
- Publication number 20230334331
- Publication date Oct 19, 2023
- Canon Kabushiki Kaisha
- Ryo NAWATA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MOTION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, PLANARIZATION APPA...
- Publication number 20230194999
- Publication date Jun 22, 2023
- Canon Kabushiki Kaisha
- RYO NAWATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FEEDBACK CONTROL DEVICE, ARTICLE MANUFACTURING METHOD, AND FEEDBACK...
- Publication number 20220107610
- Publication date Apr 7, 2022
- Canon Kabushiki Kaisha
- Ryo Nawata
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING A...
- Publication number 20220063176
- Publication date Mar 3, 2022
- Canon Kabushiki Kaisha
- Ryo Nawata
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINTING APPARATUS, IMPRINTING METHOD, METHOD FOR PRODUCING ARTIC...
- Publication number 20210157230
- Publication date May 27, 2021
- Canon Kabushiki Kaisha
- Ryo Nawata
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD AND METHOD FOR MANUFACTURING ARTICLE
- Publication number 20200376741
- Publication date Dec 3, 2020
- Canon Kabushiki Kaisha
- Ryo Nawata
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20200189175
- Publication date Jun 18, 2020
- Canon Kabushiki Kaisha
- Ryo Nawata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...
- Publication number 20170102626
- Publication date Apr 13, 2017
- Canon Kabushiki Kaisha
- Ryo Nawata
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MA...
- Publication number 20150369330
- Publication date Dec 24, 2015
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VIBRATION REDUCTION APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF...
- Publication number 20150268566
- Publication date Sep 24, 2015
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VIBRATION REDUCTION APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF...
- Publication number 20150153659
- Publication date Jun 4, 2015
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE ACQUISITION APPARATUS AND METHOD FOR ADJUSTING IMAGE ACQUISIT...
- Publication number 20130147939
- Publication date Jun 13, 2013
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Application
IMAGING APPARATUS AND CONTROL METHOD THEREFOR
- Publication number 20120314050
- Publication date Dec 13, 2012
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Application
VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...
- Publication number 20120105820
- Publication date May 3, 2012
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VIBRATION ISOLATION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACT...
- Publication number 20120045723
- Publication date Feb 23, 2012
- Canon Kabushiki Kaisha
- Ryo NAWATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Element Positioning Apparatus, Projection Optical System an...
- Publication number 20100321803
- Publication date Dec 23, 2010
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Application
MIRROR SUBSTRATE, MIRROR, EXPOSURE APPARATUS, DEVICE MANUFACTURING...
- Publication number 20100165313
- Publication date Jul 1, 2010
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT POSITIONING APPARATUS, PROJECTION OPTICAL SYSTEM AN...
- Publication number 20090021847
- Publication date Jan 22, 2009
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Application
ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
- Publication number 20080068603
- Publication date Mar 20, 2008
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20080037029
- Publication date Feb 14, 2008
- Canon Kabushiki Kaisha
- Ryo Nawata
- G01 - MEASURING TESTING
Information Patent Application
Positioning device, exposure apparatus using the positioning device...
- Publication number 20050077986
- Publication date Apr 14, 2005
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Technique for positioning optical system element
- Publication number 20050063288
- Publication date Mar 24, 2005
- Ryo Nawata
- G02 - OPTICS
Information Patent Application
Positioning apparatus, exposure apparatus, and method for producing...
- Publication number 20040179192
- Publication date Sep 16, 2004
- Makoto Mizuno
- G02 - OPTICS

Person

Patents Grantslast 30 patents

Motion control apparatus, lithography apparatus, planarization appa...

Feedback control device that suppresses disturbance vibration using...

Imprinting apparatus, imprinting method, method for producing artic...

Imprint method, imprint apparatus, and article manufacturing method

Imprint method and method for manufacturing article

Vibration control apparatus, lithography apparatus, and method of m...

Vibration reduction apparatus, lithography apparatus and method of...

Vibration reduction apparatus, lithography apparatus, and method of...

Vibration control apparatus, lithography apparatus, and article man...

Vibration control apparatus, lithography apparatus, and method of m...

Optical element positioning apparatus, projection optical system an...

Optical element positioning apparatus, projection optical system an...

Exposure apparatus and exposure method

Optical apparatus, exposure apparatus, and device manufacturing method

Technique for positioning optical system element

Positioning apparatus, exposure apparatus, and method for producing...

Positioning device, exposure apparatus using the positioning device...

Patents Applicationslast 30 patents

CONTROL DEVICE, CONTROL METHOD, STORAGE MEDIUM, AND ARTICLE MANUFAC...

FEEDBACK CONTROL DEVICE THAT SUPPRESSES DISTURBANCE VIBRATION USING...

MANAGEMENT APPARATUS, PROCESSING SYSTEM, MANAGEMENT METHOD, AND ART...

MOTION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, PLANARIZATION APPA...

FEEDBACK CONTROL DEVICE, ARTICLE MANUFACTURING METHOD, AND FEEDBACK...

CONTROL APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING A...

IMPRINTING APPARATUS, IMPRINTING METHOD, METHOD FOR PRODUCING ARTIC...

IMPRINT METHOD AND METHOD FOR MANUFACTURING ARTICLE

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...

VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MA...

VIBRATION REDUCTION APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF...

VIBRATION REDUCTION APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF...

IMAGE ACQUISITION APPARATUS AND METHOD FOR ADJUSTING IMAGE ACQUISIT...

IMAGING APPARATUS AND CONTROL METHOD THEREFOR

VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...

VIBRATION ISOLATION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACT...

Optical Element Positioning Apparatus, Projection Optical System an...

MIRROR SUBSTRATE, MIRROR, EXPOSURE APPARATUS, DEVICE MANUFACTURING...

OPTICAL ELEMENT POSITIONING APPARATUS, PROJECTION OPTICAL SYSTEM AN...

ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...

OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Positioning device, exposure apparatus using the positioning device...

Technique for positioning optical system element

Positioning apparatus, exposure apparatus, and method for producing...