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Ryo NONAKA
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Nirasaki-shi, JP
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last 30 patents
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Patent Grant
Temperature control device for target substrate, temperature contro...
Patent number
7,988,062
Issue date
Aug 2, 2011
Tokyo Electron Limited
Ryo Nonaka
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
TEMPERATURE CONTROL DEVICE FOR TARGET SUBSTRATE, TEMPERATURE CONTRO...
Publication number
20090118872
Publication date
May 7, 2009
TOKYO ELECTRON LIMITED
Ryo NONAKA
G05 - CONTROLLING REGULATING
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Patent Application
TEMPERATURE CONTROL DEVICE
Publication number
20080314564
Publication date
Dec 25, 2008
TOKYO ELECTRON LIMITED
Kazuya NAGASEKI
G05 - CONTROLLING REGULATING