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Patents Grants
last 30 patents
Information
Patent Grant
Mask blank, method for manufacturing transfer mask, and method for...
Patent number
12,153,338
Issue date
Nov 26, 2024
Hoya Corporation
Hiroaki Shishido
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, method of manufacturing imprint mold, method of manufac...
Patent number
12,007,684
Issue date
Jun 11, 2024
Hoya Corporation
Osamu Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask blank, method for manufacturing reflective mask, and method fo...
Patent number
11,762,279
Issue date
Sep 19, 2023
Hoya Corporation
Osamu Nozawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, method for manufacturing phase shift mask, and method f...
Patent number
11,630,388
Issue date
Apr 18, 2023
Hoya Corporation
Osamu Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask blank, method for manufacturing transfer mask, and method for...
Patent number
11,435,662
Issue date
Sep 6, 2022
Hoya Corporation
Ryo Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, phase shift mask, and method for manufacturing semicond...
Patent number
11,415,875
Issue date
Aug 16, 2022
Hoya Corporation
Hitoshi Maeda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, method for manufacturing transfer mask, and method for...
Patent number
11,281,089
Issue date
Mar 22, 2022
Hoya Corporation
Osamu Nozawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, method for manufacturing transfer mask, and method for...
Patent number
11,119,400
Issue date
Sep 14, 2021
Hoya Corporation
Ryo Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, phase shift mask, method for manufacturing phase shift...
Patent number
11,054,735
Issue date
Jul 6, 2021
Hoya Corporation
Takenori Kajiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, phase shift mask, and method of manufacturing semicondu...
Patent number
11,022,875
Issue date
Jun 1, 2021
Hoya Corporation
Kazutake Taniguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask blank, phase shift mask, and method for manufacturing semicond...
Patent number
11,009,787
Issue date
May 18, 2021
Hoya Corporation
Hitoshi Maeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask blank, method for manufacturing phase shift mask, and method f...
Patent number
10,915,016
Issue date
Feb 9, 2021
Hoya Corporation
Osamu Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask blank, transfer mask, method for manufacturing transfer mask,...
Patent number
10,571,797
Issue date
Feb 25, 2020
Hoya Corporation
Osamu Nozawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, transfer mask, method for manufacturing transfer mask,...
Patent number
10,527,931
Issue date
Jan 7, 2020
Hoya Corporation
Osamu Nozawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mask blank, transfer mask, method of manufacturing transfer mask an...
Patent number
10,481,485
Issue date
Nov 19, 2019
Hoya Corporation
Osamu Nozawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, transfer mask and methods of manufacturing the same
Patent number
10,365,555
Issue date
Jul 30, 2019
Hoya Corporation
Hiroaki Shishido
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mask blank, transfer mask, method for manufacturing transfer mask,...
Patent number
10,101,650
Issue date
Oct 16, 2018
Hoya Corporation
Osamu Nozawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mask blank and method of manufacturing phase shift mask
Patent number
9,952,497
Issue date
Apr 24, 2018
Hoya Corporation
Yasushi Okubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, transfer mask, and method for manufacturing transfer mask
Patent number
9,726,972
Issue date
Aug 8, 2017
Hoya Corporation
Hiroaki Shishido
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reflective mask blank, reflective mask and method of manufacturing...
Patent number
9,625,805
Issue date
Apr 18, 2017
Hoya Corporation
Kazuya Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank and method of manufacturing phase shift mask
Patent number
9,494,852
Issue date
Nov 15, 2016
Hoya Corporation
Yasushi Okubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflective mask blank, reflective mask and method of manufacturing...
Patent number
9,075,315
Issue date
Jul 7, 2015
Hoya Corporation
Kazuya Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, transfer mask, method of manufacturing transfer mask an...
Patent number
9,029,048
Issue date
May 12, 2015
Hoya Corporation
Kazuya Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask blank manufacturing method and photomask manufacturing me...
Patent number
8,221,941
Issue date
Jul 17, 2012
Hoya Corporation
Toshiyuki Suzuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone phase shift mask blank, halftone phase shift mask, and met...
Patent number
7,632,612
Issue date
Dec 15, 2009
Hoya Corporation
Yuuki Shiota
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Reflective mask blank having a programmed defect and method of prod...
Patent number
7,282,305
Issue date
Oct 16, 2007
Hoya Corporation
Tsutomo Shoki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Halftone phase shift mask blank, halftone phase shift mask, and met...
Patent number
7,115,341
Issue date
Oct 3, 2006
Hoya Corporation
Yuuki Shiota
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Halftone-type phase-shift mask blank, and halftone-type phase-shift...
Patent number
7,011,910
Issue date
Mar 14, 2006
Hoya Corporation
Yuki Shiota
G02 - OPTICS
Information
Patent Grant
Method of manufacturing X-ray mask and X-ray mask blank, and X-ray...
Patent number
6,317,480
Issue date
Nov 13, 2001
Hoya Corporation
Tsutomu Shoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MASK BLANK, METHOD OF MANUFACTURING IMPRINT MOLD, METHOD OF MANUFAC...
Publication number
20230367196
Publication date
Nov 16, 2023
HOYA CORPORATION
Osamu NOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR...
Publication number
20220214608
Publication date
Jul 7, 2022
HOYA CORPORATION
Hiroaki SHISHIDO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR...
Publication number
20220179300
Publication date
Jun 9, 2022
HOYA CORPORATION
Hiroaki SHISHIDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK, METHOD FOR MANUFACTURING REFLECTIVE MASK, AND METHOD FO...
Publication number
20220163880
Publication date
May 26, 2022
HOYA CORPORATION
Osamu NOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK, TRANSFER MASK, AND SEMICONDUCTOR-DEVICE MANUFACTURING M...
Publication number
20220043335
Publication date
Feb 10, 2022
HOYA CORPORATION
Ryo OHKUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK, TRANSFER MASK, AND SEMICONDUCTOR-DEVICE MANUFACTURING M...
Publication number
20220035235
Publication date
Feb 3, 2022
HOYA CORPORATION
Ryo OHKUBO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MASK BLANK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR...
Publication number
20210364910
Publication date
Nov 25, 2021
HOYA CORPORATION
Ryo OHKUBO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING SEMICOND...
Publication number
20210255538
Publication date
Aug 19, 2021
HOYA CORPORATION
Hitoshi MAEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK, METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND METHOD F...
Publication number
20210149294
Publication date
May 20, 2021
HOYA CORPORATION
Osamu NOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK, METHOD FOR PRODUCING TRANSFER MASK, AND METHOD FOR PROD...
Publication number
20210109436
Publication date
Apr 15, 2021
HOYA CORPORATION
Ryo OHKUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING SEMICOND...
Publication number
20210088895
Publication date
Mar 25, 2021
HOYA CORPORATION
Hitoshi MAEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING SEMICOND...
Publication number
20200409252
Publication date
Dec 31, 2020
HOYA CORPORATION
Kazutake TANIGUCHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, TRANSFER MASK, METHOD FOR MANUFACTURING TRANSFER MASK,...
Publication number
20200150524
Publication date
May 14, 2020
HOYA CORPORATION
Osamu NOZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MASK BLANK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR...
Publication number
20200064725
Publication date
Feb 27, 2020
HOYA CORPORATION
Osamu NOZAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, PHASE SHIFT MASK, METHOD FOR MANUFACTURING PHASE SHIFT...
Publication number
20190163047
Publication date
May 30, 2019
HOYA CORPORATION
Takenori KAJIWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK, METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND METHOD F...
Publication number
20190040516
Publication date
Feb 7, 2019
HOYA CORPORATION
Ryo OHKUBO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MASK BLANK, TRANSFER MASK, METHOD FOR MANUFACTURING TRANSFER MASK,...
Publication number
20190004419
Publication date
Jan 3, 2019
HOYA CORPORATION
Osamu NOZAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND METHOD F...
Publication number
20180299767
Publication date
Oct 18, 2018
HOYA CORPORATION
Osamu NOZAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, TRANSFER MASK, METHOD OF MANUFACTURING TRANSFER MASK AN...
Publication number
20180259841
Publication date
Sep 13, 2018
HOYA CORPORATION
Osamu NOZAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, TRANSFER MASK, METHOD FOR MANUFACTURING TRANSFER MASK,...
Publication number
20180052387
Publication date
Feb 22, 2018
HOYA CORPORATION
Osamu NOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK BLANK AND METHOD OF MANUFACTURING PHASE SHIFT MASK
Publication number
20170023856
Publication date
Jan 26, 2017
HOYA CORPORATION
Yasushi Okubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, TRANSFER MASK, AND METHOD FOR MANUFACTURING TRANSFER MASK
Publication number
20160202603
Publication date
Jul 14, 2016
HOYA CORPORATION
Hiroaki SHISHIDO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, TRANSFER MASK AND METHODS OF MANUFACTURING THE SAME
Publication number
20160202602
Publication date
Jul 14, 2016
HOYA CORPORATION
Hiroaki SHISHIDO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, TRANSFER MASK, METHOD FOR MANUFACTURING TRANSFER MASK,...
Publication number
20160187769
Publication date
Jun 30, 2016
HOYA CORPORATION
Osamu NOZAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE MASK BLANK, REFLECTIVE MASK AND METHOD OF MANUFACTURING...
Publication number
20150261083
Publication date
Sep 17, 2015
HOYA CORPORATION
Kazuya SAKAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK AND METHOD OF MANUFACTURING PHASE SHIFT MASK
Publication number
20150198873
Publication date
Jul 16, 2015
HOYA CORPORATION
Yasushi Okubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, TRANSFER MASK, METHOD OF MANUFACTURING TRANSFER MASK AN...
Publication number
20130078553
Publication date
Mar 28, 2013
HOYA CORPORATION
Kazuya SAKAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE MASK BLANK, REFLECTIVE MASK AND METHOD OF MANUFACTURING...
Publication number
20130078554
Publication date
Mar 28, 2013
HOYA CORPORATION
Kazuya SAKAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK BLANK MANUFACTURING METHOD AND PHOTOMASK MANUFACTURING ME...
Publication number
20100167185
Publication date
Jul 1, 2010
HOYA CORPORATION
Toshiyuki SUZUKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Halftone phase shift mask blank, halftone phase shift mask, and met...
Publication number
20070082278
Publication date
Apr 12, 2007
Hoya Corporation
Yuuki Shiota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY