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Ryo SASAKI
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Baffle unit and substrate processing apparatus
Patent number
12,062,527
Issue date
Aug 13, 2024
Tokyo Electron Limited
Jun Young Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,721,531
Issue date
Aug 8, 2023
Tokyo Electron Limited
Ryo Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,380,527
Issue date
Jul 5, 2022
Tokyo Electron Limited
Ryo Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus having a baffle plate and a rectifying...
Patent number
10,304,666
Issue date
May 28, 2019
Tokyo Electron Limited
Ryo Sasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230069117
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Ryo SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220285137
Publication date
Sep 8, 2022
TOKYO ELECTRON LIMITED
Ryo SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BAFFLE UNIT AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210193443
Publication date
Jun 24, 2021
TOKYO ELECTRON LIMITED
Jun Young CHUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210104383
Publication date
Apr 8, 2021
TOKYO ELECTRON LIMITED
Ryo SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210043427
Publication date
Feb 11, 2021
TOKYO ELECTRON LIMITED
Ryo SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COOLING STRUCTURE AND PARALLEL PLATE ETCHING APPARATUS
Publication number
20200035464
Publication date
Jan 30, 2020
TOKYO ELECTRON LIMITED
Keita KAMBARA
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
HEAT TRANSFER SHEET AND SUBSTRATE PROCESSING APPARATUS
Publication number
20190019716
Publication date
Jan 17, 2019
TOKYO ELECTRON LIMITED
Ryo SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20170025256
Publication date
Jan 26, 2017
TOKYO ELECTRON LIMITED
Ryo SASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COOLING STRUCTURE AND PARALLEL PLATE ETCHING APPARATUS
Publication number
20160203955
Publication date
Jul 14, 2016
TOKYO ELECTRON LIMITED
Keita KAMBARA
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
PLASMA PROCESSING APPARATUS AND FOCUS RING
Publication number
20160042926
Publication date
Feb 11, 2016
TOKYO ELECTRON LIMITED
Takuya ISHIKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...