Ryo Sato

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Yamanashi, JP

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Patents Applicationslast 30 patents

Information Patent Application
ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA, INDUCTIVELY COUPLED PL...
- Publication number 20230268160
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Toshihiro TOJO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA, INDUCTIVELY COUPLED PL...
- Publication number 20130200043
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Toshihiro TOJO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20050241769
- Publication date Nov 3, 2005
- TOKYO ELECTRON LIMITED
- Tsutomu Satoyoshi
- H01 - BASIC ELECTRIC ELEMENTS