Ryo Takai

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vibration damping apparatus, lithography apparatus, and method of m...
- Patent number 10,481,509
- Issue date Nov 19, 2019
- Canon Kabushiki Kaisha
- Yoshihiro Morimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 10,197,926
- Issue date Feb 5, 2019
- Canon Kabushiki Kaisha
- Ryo Takai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometer system, lithography apparatus, and article manufactu...
- Patent number 9,804,510
- Issue date Oct 31, 2017
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometric measurement of rotation of stage apparatus and adju...
- Patent number 9,217,937
- Issue date Dec 22, 2015
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus including interferometer system
- Patent number 6,819,433
- Issue date Nov 16, 2004
- Canon Kabushiki Kaisha
- Ryo Takai
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
VIBRATION DAMPING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...
- Publication number 20190278185
- Publication date Sep 12, 2019
- Canon Kabushiki Kaisha
- Yoshihiro Morimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20170184983
- Publication date Jun 29, 2017
- Canon Kabushiki Kaisha
- Ryo Takai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERFEROMETER SYSTEM, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...
- Publication number 20140198307
- Publication date Jul 17, 2014
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Application
STAGE APPARATUS AND ADJUSTMENT METHOD THEREOF, EXPOSURE APPARATUS,...
- Publication number 20140125962
- Publication date May 8, 2014
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20110051109
- Publication date Mar 3, 2011
- Canon Kabushiki Kaisha
- Keiji EMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus including interferometer system
- Publication number 20020109850
- Publication date Aug 15, 2002
- Canon Kabushiki Kaisha
- Ryo Takai
- G01 - MEASURING TESTING