Ryo Terashima

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,817,321
- Issue date Nov 14, 2023
- Tokyo Electron Limited
- Yuzuru Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,380,547
- Issue date Jul 5, 2022
- Tokyo Electron Limited
- Ryo Terashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 10,658,193
- Issue date May 19, 2020
- Tokyo Electron Limited
- Ryo Terashima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20230420228
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Akihiro YOKOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220122847
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Yuzuru SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210134596
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Ryo TERASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20190214267
- Publication date Jul 11, 2019
- TOKYO ELECTRON LIMITED
- Ryo Terashima
- H01 - BASIC ELECTRIC ELEMENTS