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Ryohei TAKEDA

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 12,051,570
    • Issue date Jul 30, 2024
    • Tokyo Electron Limited
    • Maju Tomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 10,381,237
    • Issue date Aug 13, 2019
    • Tokyo Electron Limited
    • Ryohei Takeda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 9,997,374
    • Issue date Jun 12, 2018
    • Tokyo Electron Limited
    • Ryohei Takeda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and plasma processing apparatus
    • Patent number 9,922,806
    • Issue date Mar 20, 2018
    • Tokyo Electron Limited
    • Maju Tomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and etching apparatus
    • Patent number 9,659,789
    • Issue date May 23, 2017
    • Tokyo Electron Limited
    • Ryohei Takeda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching method
    • Patent number 9,570,312
    • Issue date Feb 14, 2017
    • Tokyo Electron Limited
    • Ryohei Takeda
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PREDICTION METHOD AND INFORMATION PROCESSING APPARATUS
    • Publication number 20230298867
    • Publication date Sep 21, 2023
    • TOKYO ELECTRON LIMITED
    • Keita YAEGASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS, CONTROL METHOD, AND STORAGE MEDIUM
    • Publication number 20230111278
    • Publication date Apr 13, 2023
    • TOKYO ELECTRON LIMITED
    • Soya TODO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210272780
    • Publication date Sep 2, 2021
    • TOKYO ELECTRON LIMITED
    • Maju TOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20180261465
    • Publication date Sep 13, 2018
    • TOKYO ELECTRON LIMITED
    • Ryohei TAKEDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20180174805
    • Publication date Jun 21, 2018
    • TOKYO ELECTRON LIMITED
    • Maju TOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20170178921
    • Publication date Jun 22, 2017
    • TOKYO ELECTRON LIMITED
    • Ryohei TAKEDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20160379856
    • Publication date Dec 29, 2016
    • TOKYO ELECTRON LIMITED
    • Maju TOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND ETCHING APPARATUS
    • Publication number 20160189975
    • Publication date Jun 30, 2016
    • TOKYO ELECTRON LIMITED
    • Ryohei TAKEDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20150099366
    • Publication date Apr 9, 2015
    • TOKYO ELECTRON LIMITED
    • Ryohei Takeda
    • H01 - BASIC ELECTRIC ELEMENTS