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Patents Grants
last 30 patents
Information
Patent Grant
Plasma treatment apparatus
Patent number
12,112,922
Issue date
Oct 8, 2024
HITACHI HIGH-TECH CORPORATION
Kentaro Kiyosue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operation method of vacuum processing device
Patent number
12,002,692
Issue date
Jun 4, 2024
HITACHI HIGH-TECH CORPORATION
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and operating method of vacuum processi...
Patent number
11,600,472
Issue date
Mar 7, 2023
HITACHI HIGH-TECH CORPORATION
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operation method of vacuum processing device
Patent number
11,195,733
Issue date
Dec 7, 2021
HITACHI HIGH-TECH CORPORATION
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and operating method thereof
Patent number
9,748,124
Issue date
Aug 29, 2017
Hitachi High-Technologies Corporation
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240194453
Publication date
Jun 13, 2024
Hitachi High-Tech Corporation
Yusuke TAKAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA TREATMENT APPARATUS
Publication number
20240047179
Publication date
Feb 8, 2024
Hitachi High-Tech Corporation
Kentaro Kiyosue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATION METHOD OF VACUUM PROCESSING DEVICE
Publication number
20220051917
Publication date
Feb 17, 2022
HITACHI HIGH-TECH CORPORATION
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATION METHOD OF VACUUM PROCESSING DEVICE
Publication number
20190295871
Publication date
Sep 26, 2019
Hitachi High-Technologies Corporation
Ryoichi ISOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF VACUUM PROCESSI...
Publication number
20190157053
Publication date
May 23, 2019
Hitachi High-Technologies Corporation
Ryoichi ISOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND OPERATING METHOD THEREOF
Publication number
20140271049
Publication date
Sep 18, 2014
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS