Ryoichi Kakehi

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Shizuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam adjustment method, charged particle beam draw...
- Patent number 11,658,002
- Issue date May 23, 2023
- NuFlare Technology, Inc.
- Ryoichi Kakehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 11,037,759
- Issue date Jun 15, 2021
- NuFlare Technology, Inc.
- Ryoichi Kakehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and optical axis deviation...
- Patent number 8,076,649
- Issue date Dec 13, 2011
- Nuflare Technology, Inc.
- Michihiro Sakai
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM ADJUSTMENT METHOD, CHARGED PARTICLE BEAM DRAW...
- Publication number 20220068591
- Publication date Mar 3, 2022
- NuFlare Technology, Inc.
- Ryoichi KAKEHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20190103252
- Publication date Apr 4, 2019
- NuFlare Technology, Inc.
- Ryoichi KAKEHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND OPTICAL AXIS DEVIATION...
- Publication number 20100224789
- Publication date Sep 9, 2010
- NuFlare Technology, Inc.
- Michihiro Sakai
- B82 - NANO-TECHNOLOGY