Ryoichi Uemura

Person

Kikuchi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Coating processing apparatus and coating liquid collecting member
- Patent number 10,699,919
- Issue date Jun 30, 2020
- Tokyo Electron Limited
- Ryoichi Uemura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate cleaning method, substrate cleaning apparatus, and comput...
- Patent number 9,869,941
- Issue date Jan 16, 2018
- Tokyo Electron Limited
- Ryoichi Uemura
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method, substrate cleaning apparatus, and comput...
- Patent number 9,570,326
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Ryoichi Uemura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature control method of heat processing plate, computer stora...
- Patent number 8,698,052
- Issue date Apr 15, 2014
- Tokyo Electron Limited
- Masahide Tadokoro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature control method of heat processing plate, computer stora...
- Patent number 8,242,417
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Masahide Tadokoro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate-processing apparatus, substrate-processing method, substr...
- Patent number 7,867,674
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate-processing apparatus, substrate-processing method, substr...
- Patent number 7,867,673
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate-processing apparatus, substrate-processing method, substr...
- Patent number 7,862,966
- Issue date Jan 4, 2011
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 6,921,554
- Issue date Jul 26, 2005
- Tokyo Electron Limited
- Koji Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing unit
- Patent number 6,402,844
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Koji Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COATING PROCESSING APPARATUS AND COATING LIQUID COLLECTING MEMBER
- Publication number 20190067043
- Publication date Feb 28, 2019
- TOKYO ELECTRON LIMITED
- Ryoichi UEMURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND COMPUT...
- Publication number 20170090305
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Ryoichi UEMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND COMPUT...
- Publication number 20150194301
- Publication date Jul 9, 2015
- TOKYO ELECTRON LIMITED
- Ryoichi UEMURA
- B08 - CLEANING
Information Patent Application
TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...
- Publication number 20120279955
- Publication date Nov 8, 2012
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...
- Publication number 20090162759
- Publication date Jun 25, 2009
- TOKYO ELECTRON LIMITED
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...
- Publication number 20090104548
- Publication date Apr 23, 2009
- TOKYO ELECTRON LIMITED
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...
- Publication number 20090047586
- Publication date Feb 19, 2009
- TOKYO ELECTRON LIMITED
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...
- Publication number 20070272680
- Publication date Nov 29, 2007
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate processing method and substrate processing unit
- Publication number 20020153351
- Publication date Oct 24, 2002
- Koji Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coating film forming apparatus and coating film forming method
- Publication number 20010016225
- Publication date Aug 23, 2001
- Kunie Ogata
- H01 - BASIC ELECTRIC ELEMENTS

Ryoichi Uemura

Person

Patents Grantslast 30 patents

Coating processing apparatus and coating liquid collecting member

Substrate cleaning method, substrate cleaning apparatus, and comput...

Substrate cleaning method, substrate cleaning apparatus, and comput...

Temperature control method of heat processing plate, computer stora...

Temperature control method of heat processing plate, computer stora...

Substrate-processing apparatus, substrate-processing method, substr...

Substrate-processing apparatus, substrate-processing method, substr...

Substrate-processing apparatus, substrate-processing method, substr...

Substrate processing method

Substrate processing method and substrate processing unit

Patents Applicationslast 30 patents

COATING PROCESSING APPARATUS AND COATING LIQUID COLLECTING MEMBER

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND COMPUT...

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND COMPUT...

TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...

SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...

SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...

SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...

TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...

Substrate processing method and substrate processing unit

Coating film forming apparatus and coating film forming method