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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
10,796,882
Issue date
Oct 6, 2020
NuFlare Technology, Inc.
Ryoichi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged particle beam writing apparatus, and multiple char...
Patent number
10,784,080
Issue date
Sep 22, 2020
NuFlare Technology, Inc.
Ryoichi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing method and multi charged partic...
Patent number
RE47561
Issue date
Aug 6, 2019
NuFlare Technology, Inc.
Ryoichi Yoshikawa
Information
Patent Grant
Multi charged particle beam writing method and multi charged partic...
Patent number
10,020,159
Issue date
Jul 10, 2018
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
9,934,935
Issue date
Apr 3, 2018
NuFlare Technology, Inc.
Ryoichi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Blanking device for multi-beam of charged particle writing apparatu...
Patent number
9,805,905
Issue date
Oct 31, 2017
NuFlare Technology, Inc.
Hiroshi Yamashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing method, and multi charged parti...
Patent number
9,691,585
Issue date
Jun 27, 2017
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing method and multi charged partic...
Patent number
9,570,267
Issue date
Feb 14, 2017
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Blanking aperture array device for multi-beams, and fabrication met...
Patent number
9,530,610
Issue date
Dec 27, 2016
NuFlare Technology, Inc.
Kazuhiro Chiba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
9,343,268
Issue date
May 17, 2016
NuFlare Technology, Inc.
Ryoichi Yoshikawa
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multi charged particle beam writing apparatus, and multi charged pa...
Patent number
9,287,090
Issue date
Mar 15, 2016
NuFlare Technology, Inc.
Ryoichi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing method and multi charged partic...
Patent number
9,202,673
Issue date
Dec 1, 2015
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
9,076,564
Issue date
Jul 7, 2015
Nuflare Technology, Inc.
Ryoichi Yoshikawa
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
8,907,306
Issue date
Dec 9, 2014
NuFlare Technology, Inc.
Ryoichi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
8,741,547
Issue date
Jun 3, 2014
Nuflare Technology, Inc.
Ryoichi Yoshikawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Multi charged particle beam writing method and multi charged partic...
Patent number
8,729,507
Issue date
May 20, 2014
Nuflare Technology, Inc.
Ryoichi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
8,710,467
Issue date
Apr 29, 2014
Nuflare Technology, Inc.
Ryoichi Yoshikawa
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
8,586,951
Issue date
Nov 19, 2013
Nuflare Technology, Inc.
Ryoichi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam lithography apparatus and method
Patent number
5,760,410
Issue date
Jun 2, 1998
Kabushiki Kaisha Toshiba
Kazuto Matsuki
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and system for generating a bit pattern
Patent number
5,404,410
Issue date
Apr 4, 1995
Kabushiki Kaisha Toshiba
Toru Tojo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Optical pattern inspection system
Patent number
5,185,812
Issue date
Feb 9, 1993
Kabushiki Kaisha Toshiba
Kyoji Yamashita
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus for inspecting mask used for manufacturing integrated cir...
Patent number
4,623,256
Issue date
Nov 18, 1986
Kabushiki Kaisha Toshiba
Osamu Ikenaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...
Publication number
20190304749
Publication date
Oct 3, 2019
NuFlare Technology, Inc.
Ryoichi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20190304748
Publication date
Oct 3, 2019
NuFlare Technology, Inc.
Ryoichi Yoshikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
Publication number
20180261421
Publication date
Sep 13, 2018
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
Publication number
20170098524
Publication date
Apr 6, 2017
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20170047194
Publication date
Feb 16, 2017
NuFlare Technology, Inc.
Ryoichi YOSHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS, AND FABRICATION MET...
Publication number
20160155600
Publication date
Jun 2, 2016
NuFlare Technology, Inc.
Kazuhiro CHIBA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, MULTI CHARGED PAR...
Publication number
20160064179
Publication date
Mar 3, 2016
NuFlare Technology, Inc.
Hiroshi YAMASHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
Publication number
20160042908
Publication date
Feb 11, 2016
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD, AND MULTI CHARGED PARTI...
Publication number
20150340196
Publication date
Nov 26, 2015
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...
Publication number
20150155138
Publication date
Jun 4, 2015
NuFlare Technology, Inc.
Ryoichi YOSHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20150064934
Publication date
Mar 5, 2015
NuFlare Technology, Inc.
Ryoichi YOSHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20140225008
Publication date
Aug 14, 2014
NuFlare Technology, Inc.
Ryoichi YOSHIKAWA
B82 - NANO-TECHNOLOGY
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20140187056
Publication date
Jul 3, 2014
NuFlare Technology, Inc.
Ryoichi Yoshikawa
B82 - NANO-TECHNOLOGY
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
Publication number
20140124684
Publication date
May 8, 2014
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
Publication number
20130320230
Publication date
Dec 5, 2013
NuFlare Technology, Inc.
Ryoichi Yoshikawa
B82 - NANO-TECHNOLOGY
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20130157198
Publication date
Jun 20, 2013
NuFlare Technology, Inc.
Ryoichi YOSHIKAWA
B82 - NANO-TECHNOLOGY
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20130056645
Publication date
Mar 7, 2013
NuFlare Technology, Inc.
Ryoichi Yoshikawa
B82 - NANO-TECHNOLOGY
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20130056647
Publication date
Mar 7, 2013
NuFlare Technology, Inc.
Ryoichi Yoshikawa
B82 - NANO-TECHNOLOGY