Ryoichiro Koshi

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Yamanashi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method, plasma processing apparatus, and plasma g...
- Patent number 5,783,492
- Issue date Jul 21, 1998
- Tokyo Electron Limited
- Kimihiro Higuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...