TREA

Ryoji Fukuyama

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  • Kudamatsu, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus and plasma processing method
    • Patent number 6,506,686
    • Issue date Jan 14, 2003
    • Hitachi, Ltd.
    • Toshio Masuda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processor
    • Patent number 4,631,106
    • Issue date Dec 23, 1986
    • Hitachi, Ltd.
    • Norio Nakazato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method
    • Patent number 4,618,398
    • Issue date Oct 21, 1986
    • Hitachi, Ltd.
    • Makoto Nawata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents