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Ryoji Hamasaki
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Hikari-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
7,565,879
Issue date
Jul 28, 2009
Hitachi, Ltd.
Saburo Kanai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
7,208,422
Issue date
Apr 24, 2007
Hitachi, Ltd.
Saburo Kanai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for plasma processing
Patent number
6,156,663
Issue date
Dec 5, 2000
Hitachi, Ltd.
Katsuya Watanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method in which a...
Patent number
5,895,586
Issue date
Apr 20, 1999
Hitachi, Ltd.
Tetsunori Kaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
5,874,012
Issue date
Feb 23, 1999
Hitachi, Ltd.
Saburo Kanai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma Processing Apparatus And Plasma Processing Method
Publication number
20100140224
Publication date
Jun 10, 2010
Saburo Kanai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Processing Apparatus And Plasma Processing Method
Publication number
20090289035
Publication date
Nov 26, 2009
Saburo Kanai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20080112780
Publication date
May 15, 2008
KATSUJI MATANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and plasma processing method
Publication number
20060249254
Publication date
Nov 9, 2006
Saburo Kanai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20050064717
Publication date
Mar 24, 2005
Saburo Kanai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing method
Publication number
20050039683
Publication date
Feb 24, 2005
Saburo Kanai
H01 - BASIC ELECTRIC ELEMENTS