Ryoji Ikebe

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system
- Patent number 11,018,035
- Issue date May 25, 2021
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, control method of substrate process...
- Patent number 11,011,436
- Issue date May 18, 2021
- Tokyo Electron Limited
- Yoshifumi Amano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Measurement processing device, substrate processing system, measure...
- Patent number 10,713,772
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Yoshifumi Amano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,707,109
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Satoshi Morita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and processing method of substrate p...
- Patent number 10,217,628
- Issue date Feb 26, 2019
- Tokyo Electron Limited
- Yoshifumi Amano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management method of substrate processing apparatus and substrate p...
- Patent number 10,128,137
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20210257236
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190096730
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20190043742
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD OF SUBSTRATE P...
- Publication number 20170287703
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF SUBSTRATE PROCESS...
- Publication number 20170287704
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANAGEMENT METHOD OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE P...
- Publication number 20170287750
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, MEASURE...
- Publication number 20160148366
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- G06 - COMPUTING CALCULATING COUNTING

Ryoji Ikebe

Person

Patents Grantslast 30 patents

Substrate processing system

Substrate processing apparatus, control method of substrate process...

Measurement processing device, substrate processing system, measure...

Substrate processing apparatus

Substrate processing apparatus and processing method of substrate p...

Management method of substrate processing apparatus and substrate p...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD OF SUBSTRATE P...

SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF SUBSTRATE PROCESS...

MANAGEMENT METHOD OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE P...

MEASUREMENT PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, MEASURE...