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Ryoji Nakajima
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Annaka, JP
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last 30 patents
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Patent Grant
Vessel of pyrolytic boron nitride
Patent number
5,759,646
Issue date
Jun 2, 1998
Shin-Etsu Chemical Co., Ltd.
Shoji Kano
C30 - CRYSTAL GROWTH
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Patent Grant
Ceramic electrostatic chuck with built-in heater
Patent number
5,663,865
Issue date
Sep 2, 1997
Shin-Etsu Chemical Co., Ltd.
Nobuo Kawada
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER