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Ryoji Todaka
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Shanghai, CN
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last 30 patents
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Patent Grant
Method and apparatus for processing semiconductor work pieces
Patent number
9,947,562
Issue date
Apr 17, 2018
Applied Materials, Inc.
AiHua Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-station workpiece processors, methods of processing semicondu...
Patent number
7,516,833
Issue date
Apr 14, 2009
Advanced Micro-Fabrication Equipment, Inc. Asia
Ryoji Todaka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING SEMICONDUCTOR WORK PIECES
Publication number
20110305544
Publication date
Dec 15, 2011
AiHua Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-station workpiece processors, methods of processing semicondu...
Publication number
20070034479
Publication date
Feb 15, 2007
Advanced Micro-Fabrication Equipment, Inc. Asia
Ryoji Todaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for processing semiconductor work pieces
Publication number
20070032097
Publication date
Feb 8, 2007
Advanced Micro-Fabrication Equipment, Inc. Asia
AiHua Chen
H01 - BASIC ELECTRIC ELEMENTS