Ryoji Yamazaki

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma observation system and plasma observation method
- Patent number 11,749,511
- Issue date Sep 5, 2023
- Tokyo Electron Limited
- Ryoji Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave irradiation apparatus
- Patent number 9,224,623
- Issue date Dec 29, 2015
- Tokyo Electron Limited
- Shigeru Kasai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
- Publication number 20230141688
- Publication date May 11, 2023
- TOKYO ELECTRON LIMITED
- Ryoji YAMAZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA OBSERVATION SYSTEM AND PLASMA OBSERVATION METHOD
- Publication number 20210225623
- Publication date Jul 22, 2021
- TOKYO ELECTRON LIMITED
- Ryoji YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20170243725
- Publication date Aug 24, 2017
- Ryoji YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
- Publication number 20150090708
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Sumi Tanaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE IRRADIATION APPARATUS
- Publication number 20120211486
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Shigeru Kasai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20120145697
- Publication date Jun 14, 2012
- TOKYO ELECTRON LIMMITED
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK APPARATUS AND SUBSTRATE COOLING METHOD
- Publication number 20110000232
- Publication date Jan 6, 2011
- TOKYO ELECTRON LIMITED
- Ryoji Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAP APPARATUS, EXHAUST SYSTEM AND PROCESSING SYSTEM USING SAME
- Publication number 20100012292
- Publication date Jan 21, 2010
- TOKYO ELECTRON LIMITED
- Ryoji YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ryoji Yamazaki

Person

Patents Grantslast 30 patents

Plasma observation system and plasma observation method

Microwave irradiation apparatus

Patents Applicationslast 30 patents

PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

PLASMA OBSERVATION SYSTEM AND PLASMA OBSERVATION METHOD

PLASMA PROCESSING APPARATUS

MICROWAVE HEATING APPARATUS AND PROCESSING METHOD

MICROWAVE IRRADIATION APPARATUS

HEAT TREATMENT APPARATUS

LOAD LOCK APPARATUS AND SUBSTRATE COOLING METHOD

TRAP APPARATUS, EXHAUST SYSTEM AND PROCESSING SYSTEM USING SAME