Ryoji YOSHIKAWA

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 9,894,271
- Issue date Feb 13, 2018
- TOSHIBA MEMORY CORPORATION
- Ryoji Yoshikawa
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Pattern forming method and mask pattern data
- Patent number 9,244,343
- Issue date Jan 26, 2016
- Kabushiki Kaisha Toshiba
- Ryoji Yoshikawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Photomask inspection method, semiconductor device inspection method...
- Patent number 8,811,713
- Issue date Aug 19, 2014
- Kabushiki Kaisha Toshiba
- Ryoji Yoshikawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection device and method of inspecting pattern
- Patent number 8,358,340
- Issue date Jan 22, 2013
- Kabushiki Kaisha Toshiba
- Ryoji Yoshikawa
- G01 - MEASURING TESTING
Information Patent Grant
Mask defect inspection data generating method, mask defect inspecti...
- Patent number 7,742,162
- Issue date Jun 22, 2010
- Kabushiki Kaisha Toshiba
- Tomohiro Tsutsui
- G01 - MEASURING TESTING
Information Patent Grant
Reference data generating method, pattern defect checking apparatus...
- Patent number 7,602,961
- Issue date Oct 13, 2009
- Kabushiki Kaisha Toshiba
- Ryoji Yoshikawa
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
- Publication number 20160275365
- Publication date Sep 22, 2016
- Kabushiki Kaisha Toshiba
- Ryoji Yoshikawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN FORMING METHOD AND MASK PATTERN DATA
- Publication number 20150021295
- Publication date Jan 22, 2015
- Kabushiki Kaisha Toshiba
- Ryoji YOSHIKAWA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TEMPLATE INSPECTION DEVICE
- Publication number 20140314305
- Publication date Oct 23, 2014
- Kabushiki Kaisha Toshiba
- Ryoji YOSHIKAWA
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY ORIGINAL CHECKING DEVICE, LITHOGRAPHY ORIGINAL CHECKING...
- Publication number 20140232032
- Publication date Aug 21, 2014
- Kabushiki Kaisha Toshiba
- Ryoji Yoshikawa
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING ME...
- Publication number 20110237087
- Publication date Sep 29, 2011
- Ryoji YOSHIKAWA
- G01 - MEASURING TESTING
Information Patent Application
PHOTOMASK INSPECTION METHOD, SEMICONDUCTOR DEVICE INSPECTION METHOD...
- Publication number 20100054577
- Publication date Mar 4, 2010
- Ryoji YOSHIKAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION DEVICE AND METHOD OF INSPECTING PATTERN
- Publication number 20090303323
- Publication date Dec 10, 2009
- Ryoji Yoshikawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASK DEFECT INSPECTION DATA GENERATING METHOD, MASK DEFECT INSPECTI...
- Publication number 20090046280
- Publication date Feb 19, 2009
- Tomohiro TSUTSUI
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING A PATTERN AND METHOD FOR MANUFA...
- Publication number 20080055606
- Publication date Mar 6, 2008
- Kabushiki Kaisha Toshiba
- Hiromu Inoue
- G01 - MEASURING TESTING
Information Patent Application
Reference data generating method, pattern defect checking apparatus...
- Publication number 20050169513
- Publication date Aug 4, 2005
- Ryoji Yoshikawa
- G06 - COMPUTING CALCULATING COUNTING

Ryoji YOSHIKAWA

Person

Patents Grantslast 30 patents

Pattern inspection apparatus and pattern inspection method

Pattern forming method and mask pattern data

Photomask inspection method, semiconductor device inspection method...

Pattern inspection device and method of inspecting pattern

Mask defect inspection data generating method, mask defect inspecti...

Reference data generating method, pattern defect checking apparatus...

Patents Applicationslast 30 patents

PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD

PATTERN FORMING METHOD AND MASK PATTERN DATA

TEMPLATE INSPECTION DEVICE

LITHOGRAPHY ORIGINAL CHECKING DEVICE, LITHOGRAPHY ORIGINAL CHECKING...

PATTERN INSPECTION METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING ME...

PHOTOMASK INSPECTION METHOD, SEMICONDUCTOR DEVICE INSPECTION METHOD...

PATTERN INSPECTION DEVICE AND METHOD OF INSPECTING PATTERN

MASK DEFECT INSPECTION DATA GENERATING METHOD, MASK DEFECT INSPECTI...

APPARATUS AND METHOD FOR INSPECTING A PATTERN AND METHOD FOR MANUFA...

Reference data generating method, pattern defect checking apparatus...