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Ryoma Hayakawa
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Osaka, JP
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for forming oxynitride film and nitride film,...
Patent number
7,507,678
Issue date
Mar 24, 2009
Sekesui Chemical Co., Ltd.
Norifumi Fujimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR FORMING OXYNITRIDE FILM AND NITRIDE FILM,...
Publication number
20080113519
Publication date
May 15, 2008
Sekisui Chemical Co., Ltd.
Norifumi FUJIMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for forming oxynitride film and nitride film,...
Publication number
20070190801
Publication date
Aug 16, 2007
Norifumi Fujimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...