Ryoma MUTO

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Miyagi, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE SUPPORT
- Publication number 20240258083
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Makoto KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220415693
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Hideto SAITO
- H01 - BASIC ELECTRIC ELEMENTS