Ryooji Fukuyama

Person

Kudamatsu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method of organic insulating film
- Patent number 7,396,481
- Issue date Jul 8, 2008
- Hitachi, Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing samples
- Patent number 7,132,293
- Issue date Nov 7, 2006
- Hitachi, Ltd.
- Yoshimi Torii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method of organic insulating film
- Patent number 7,014,787
- Issue date Mar 21, 2006
- Hitachi, Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing samples
- Patent number 6,989,228
- Issue date Jan 24, 2006
- Hitachi, Ltd.
- Masayuki Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method of organic insulating film
- Patent number 6,793,833
- Issue date Sep 21, 2004
- Hitachi, Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing samples
- Patent number 6,656,846
- Issue date Dec 2, 2003
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing samples
- Patent number 6,537,415
- Issue date Mar 25, 2003
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing samples
- Patent number 6,537,417
- Issue date Mar 25, 2003
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for treating samples
- Patent number 6,329,298
- Issue date Dec 11, 2001
- Hitachi, Ltd.
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-processing method and an apparatus for carrying out the same
- Patent number 6,328,845
- Issue date Dec 11, 2001
- Hitachi, Ltd.
- Yutaka Ohmoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing samples
- Patent number 6,254,721
- Issue date Jul 3, 2001
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method and apparatus
- Patent number 6,165,377
- Issue date Dec 26, 2000
- Hitachi, Ltd.
- Hironobu Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing samples
- Patent number 6,077,788
- Issue date Jun 20, 2000
- Hitachi, Ltd.
- Yoshinao Kawasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a sample having a metal laminate
- Patent number 6,036,816
- Issue date Mar 14, 2000
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing samples
- Patent number 5,952,245
- Issue date Sep 14, 1999
- Hitachi, Ltd.
- Yoshimi Torii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method and apparatus
- Patent number 5,900,162
- Issue date May 4, 1999
- Hitachi, Ltd.
- Hironobu Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing samples
- Patent number 5,868,854
- Issue date Feb 9, 1999
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of treating samples
- Patent number 5,770,100
- Issue date Jun 23, 1998
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of treating samples
- Patent number 5,556,714
- Issue date Sep 17, 1996
- Hitachi, Ltd.
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of treating samples
- Patent number 5,380,397
- Issue date Jan 10, 1995
- Hitachi, Ltd.
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma generating method and apparatus
- Patent number 5,276,386
- Issue date Jan 4, 1994
- Hitachi, Ltd.
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample processing method and apparatus
- Patent number 5,200,017
- Issue date Apr 6, 1993
- Hitachi, Ltd.
- Yoshinao Kawasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of removing residual corrosive compounds by plasma etching f...
- Patent number 5,007,981
- Issue date Apr 16, 1991
- Hitachi, Ltd.
- Yoshinao Kawasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma processing method and apparatus
- Patent number 4,971,651
- Issue date Nov 20, 1990
- Hitachi, Ltd.
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for processing samples
- Publication number 20070037292
- Publication date Feb 15, 2007
- Masayuki Kojima
- G01 - MEASURING TESTING
Information Patent Application
Etching method of organic insulating film
- Publication number 20060065624
- Publication date Mar 30, 2006
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching apparatus and plasma etching method
- Publication number 20050011612
- Publication date Jan 20, 2005
- Mamoru Yakushiji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing samples
- Publication number 20040219687
- Publication date Nov 4, 2004
- Yoshimi Torii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method of organic insulating film
- Publication number 20040182514
- Publication date Sep 23, 2004
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method of organic insulating film
- Publication number 20030052086
- Publication date Mar 20, 2003
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for processing samples
- Publication number 20020043339
- Publication date Apr 18, 2002
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for processing samples
- Publication number 20020043340
- Publication date Apr 18, 2002
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for processing samples
- Publication number 20020023720
- Publication date Feb 28, 2002
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing samples
- Publication number 20020013063
- Publication date Jan 31, 2002
- Masayuki Kojima
- H01 - BASIC ELECTRIC ELEMENTS

Ryooji Fukuyama

Person

Patents Grantslast 30 patents

Etching method of organic insulating film

Method and apparatus for processing samples

Etching method of organic insulating film

Method and apparatus for processing samples

Etching method of organic insulating film

Apparatus for processing samples

Apparatus for processing samples

Apparatus for processing samples

Apparatus for treating samples

Plasma-processing method and an apparatus for carrying out the same

Method and apparatus for processing samples

Plasma etching method and apparatus

Method and apparatus for processing samples

Apparatus for processing a sample having a metal laminate

Method for processing samples

Plasma etching method and apparatus

Method and apparatus for processing samples

Method of treating samples

Method of treating samples

Method of treating samples

Microwave plasma generating method and apparatus

Sample processing method and apparatus

Method of removing residual corrosive compounds by plasma etching f...

Microwave plasma processing method and apparatus

Patents Applicationslast 30 patents

Method and apparatus for processing samples

Etching method of organic insulating film

Plasma etching apparatus and plasma etching method

Method and apparatus for processing samples

Etching method of organic insulating film

Etching method of organic insulating film

Apparatus for processing samples

Apparatus for processing samples

Apparatus for processing samples

Method and apparatus for processing samples