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Ryosaku Ota

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  • Hyogo-ken, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Gas supply apparatus and gas supply method
    • Patent number 11,866,825
    • Issue date Jan 9, 2024
    • Tokyo Electron Limited
    • Hiroyuki Hayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD
    • Publication number 20220010430
    • Publication date Jan 13, 2022
    • TOKYO ELECTRON LIMITED
    • Hiroyuki HAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20100307684
    • Publication date Dec 9, 2010
    • TOKYO ELECTRON LIMITED
    • Ryosaku Ota
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR