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Ryosuke EBIHARA
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Miyagi, JP
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last 30 patents
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Patent Grant
Etching method
Patent number
11,107,692
Issue date
Aug 31, 2021
Tokyo Electron Limited
Hikaru Watanabe
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ETCHING METHOD
Publication number
20200211854
Publication date
Jul 2, 2020
TOKYO ELECTRON LIMITED
Hikaru Watanabe
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Film Forming Method and Film Forming Apparatus
Publication number
20160322218
Publication date
Nov 3, 2016
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...