Ryota GOTO

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system
- Patent number 11,081,377
- Issue date Aug 3, 2021
- Tokyo Electron Limited
- Ryota Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning thin film forming apparatus, thin film forming m...
- Patent number 9,920,424
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Ryota Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSPORT METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230230862
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Kiyoshi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20200118851
- Publication date Apr 16, 2020
- TOKYO ELECTRON LIMITED
- Ryota GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING THIN FILM FORMING APPARATUS, THIN FILM FORMING M...
- Publication number 20140187053
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Ryota GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...