Ryota IFUKU

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for detecting abnormal growth of graphene
- Patent number 12,163,898
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and apparatus for forming graphene structure
- Patent number 12,116,280
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for detecting abnormal growth of graphene, measurement appar...
- Patent number 12,037,246
- Issue date Jul 16, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Flim forming method of carbon-containing film by microwave plasma
- Patent number 12,018,375
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for forming graphene structure
- Patent number 12,014,907
- Issue date Jun 18, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and film forming method
- Patent number 11,972,929
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Makoto Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making a semiconductor device including a graphene barrie...
- Patent number 11,302,576
- Issue date Apr 12, 2022
- Tokyo Electron Limited
- Makoto Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphene structure forming method and graphene structure forming ap...
- Patent number 11,091,836
- Issue date Aug 17, 2021
- TOKYO ELECTRONICS LIMITED
- Ryota Ifuku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of nickel wiring
- Patent number 10,700,006
- Issue date Jun 30, 2020
- Tokyo Electron Limited
- Hiroaki Kawasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene forming method
- Patent number 9,702,039
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Daisuke Nishide
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240254626
- Publication date Aug 1, 2024
- Tokyo Electron Limited
- Hiroki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240120183
- Publication date Apr 11, 2024
- Tokyo Electron Limited
- Makoto WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230420294
- Publication date Dec 28, 2023
- Tokyo Electron Limited
- Makoto WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230257871
- Publication date Aug 17, 2023
- Tokyo Electron Limited
- Takashi MATSUMOTO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PRE-COATING METHOD AND PROCESSING APPARATUS
- Publication number 20230167547
- Publication date Jun 1, 2023
- Tokyo Electron Limited
- Ryota IFUKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230102051
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230080956
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Makoto WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20230042099
- Publication date Feb 9, 2023
- Tokyo Electron Limited
- Makoto WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING SYSTEM
- Publication number 20230028816
- Publication date Jan 26, 2023
- TOKYO ELECTRON LIMITED
- Zeyuan NI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND FILM FORMING METHOD
- Publication number 20220316065
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Makoto WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR FORMING GRAPHENE STRUCTURE
- Publication number 20220223407
- Publication date Jul 14, 2022
- Tokyo Electron Limited
- Ryota IFUKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DETECTING ABNORMAL GROWTH OF GRAPHENE, MEASUREMENT APPAR...
- Publication number 20220185673
- Publication date Jun 16, 2022
- Tokyo Electron Limited
- Ryota IFUKU
- G01 - MEASURING TESTING
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20220178031
- Publication date Jun 9, 2022
- Tokyo Electron Limited
- Michitaka AITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR FORMING HEXAGONAL BORON NITRIDE FILM
- Publication number 20220165568
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Nobutake KABUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DETECTING ABNORMAL GROWTH OF GRAPHENE
- Publication number 20220155242
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FILM FORMING METHOD AND PROCESSING APPARATUS
- Publication number 20210164103
- Publication date Jun 3, 2021
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING GRAPHENE STRUCTURE
- Publication number 20210047186
- Publication date Feb 18, 2021
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Semiconductor Device and Method of Manufacturing the Same
- Publication number 20200303251
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Makoto WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRAPHENE STRUCTURE FORMING METHOD AND GRAPHENE STRUCTURE FORMING AP...
- Publication number 20190085457
- Publication date Mar 21, 2019
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Planarizing Graphene Layer
- Publication number 20180226252
- Publication date Aug 9, 2018
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ANISOTROPICALLY ETCHING GRAPHENE
- Publication number 20180226261
- Publication date Aug 9, 2018
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF NICKEL WIRING
- Publication number 20180090446
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Hiroaki KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SiC FILM FORMING METHOD AND SiC FILM FORMING APPARATUS
- Publication number 20180076030
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Kazuki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING GRAPHENE
- Publication number 20180057933
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING BASE FILM OF GRAPHENE, GRAPHENE FORMING METHOD,...
- Publication number 20170268103
- Publication date Sep 21, 2017
- Tokyo Electron Limited
- Daisuke NISHIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHENE PRODUCTION METHOD, GRAPHENE PRODUCTION APPARATUS AND GRAPH...
- Publication number 20170016116
- Publication date Jan 19, 2017
- TOKYO ELECTRON LIMITED
- Daisuke NISHIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING BASE FILM OF GRAPHENE, GRAPHENE FORMING METHOD,...
- Publication number 20160042958
- Publication date Feb 11, 2016
- TOKYO ELECTRON LIMITED
- Daisuke NISHIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ryota IFUKU

Person

Patents Grantslast 30 patents

Film formation method and film formation device

Method and apparatus for detecting abnormal growth of graphene

Method and apparatus for forming graphene structure

Method for detecting abnormal growth of graphene, measurement appar...

Flim forming method of carbon-containing film by microwave plasma

Method and device for forming graphene structure

Processing apparatus and film forming method

Method of making a semiconductor device including a graphene barrie...

Graphene structure forming method and graphene structure forming ap...

Manufacturing method of nickel wiring

Graphene forming method

Patents Applicationslast 30 patents

FILM FORMING METHOD AND FILM FORMING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

PRE-COATING METHOD AND PROCESSING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

FILM FORMING METHOD AND FILM FORMING SYSTEM

PROCESSING APPARATUS AND FILM FORMING METHOD

METHOD AND DEVICE FOR FORMING GRAPHENE STRUCTURE

METHOD FOR DETECTING ABNORMAL GROWTH OF GRAPHENE, MEASUREMENT APPAR...

FILM FORMATION METHOD AND FILM FORMATION DEVICE

METHOD AND DEVICE FOR FORMING HEXAGONAL BORON NITRIDE FILM

METHOD AND APPARATUS FOR DETECTING ABNORMAL GROWTH OF GRAPHENE

FILM FORMING METHOD AND PROCESSING APPARATUS

METHOD AND APPARATUS FOR FORMING GRAPHENE STRUCTURE

Semiconductor Device and Method of Manufacturing the Same

GRAPHENE STRUCTURE FORMING METHOD AND GRAPHENE STRUCTURE FORMING AP...

Method for Planarizing Graphene Layer

METHOD OF ANISOTROPICALLY ETCHING GRAPHENE

MANUFACTURING METHOD OF NICKEL WIRING

SiC FILM FORMING METHOD AND SiC FILM FORMING APPARATUS

METHOD FOR PRODUCING GRAPHENE

METHOD FOR FORMING BASE FILM OF GRAPHENE, GRAPHENE FORMING METHOD,...

GRAPHENE PRODUCTION METHOD, GRAPHENE PRODUCTION APPARATUS AND GRAPH...

METHOD FOR FORMING BASE FILM OF GRAPHENE, GRAPHENE FORMING METHOD,...