Ryota Makino

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of determining position of mark, lithography method, exposur...
- Patent number 12,092,967
- Issue date Sep 17, 2024
- Canon Kabushiki Kaisha
- Ryota Makino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,625,073
- Issue date Jan 7, 2014
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Holding device and exposure apparatus using the same
- Patent number 7,352,520
- Issue date Apr 1, 2008
- Canon Kabushiki Kaisha
- Ryota Makino
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND ART...
- Publication number 20240393702
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- RYOTA MAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OBTAINING ARRAY OF PLURALITY OF REGIONS ON SUBSTRATE, EXP...
- Publication number 20240288781
- Publication date Aug 29, 2024
- Canon Kabushiki Kaisha
- MITSURU INOSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF DETERMINING POSITION OF MARK, LITHOGRAPHY METHOD, EXPOSUR...
- Publication number 20230236520
- Publication date Jul 27, 2023
- Canon Kabushiki Kaisha
- RYOTA MAKINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130077068
- Publication date Mar 28, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOLDING DEVICE AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20070177282
- Publication date Aug 2, 2007
- Canon Kabushiki Kaisha
- Ryota Makino
- G02 - OPTICS