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Ryotaro TAKAHASHI
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Oshu City, JP
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last 30 patents
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Patent Grant
Semiconductor manufacturing apparatus and method of controlling rot...
Patent number
12,094,746
Issue date
Sep 17, 2024
Tokyo Electron Limited
Ryotaro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE MAP GENERATING METHOD
Publication number
20250046646
Publication date
Feb 6, 2025
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF CONTROLLING ROT...
Publication number
20200251368
Publication date
Aug 6, 2020
TOKYO ELECTRON LIMITED
Ryotaro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS