Ryou Mochizuki

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Patents Grantslast 30 patents

Information Patent Grant
Etching method, plasma processing system and storage medium
- Patent number 8,177,990
- Issue date May 15, 2012
- Tokyo Electron Limited
- Ryou Mochizuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Etching method, plasma processing system and storage medium
- Publication number 20070284337
- Publication date Dec 13, 2007
- Ryou Mochizuki
- H01 - BASIC ELECTRIC ELEMENTS