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Ryou Nakagaki
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Kawasaki, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for observing specimen and device therefor
Patent number
6,756,589
Issue date
Jun 29, 2004
Hitachi, Ltd.
Kenji Obara
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method for classifying defects and device for the same
Publication number
20010042705
Publication date
Nov 22, 2001
Ryou Nakagaki
G01 - MEASURING TESTING