Ryouga Kamo

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus and cleaning method
- Patent number 9,387,520
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Nobuhiro Ogata
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20140026927
- Publication date Jan 30, 2014
- Nobuhiro Ogata
- B08 - CLEANING