Ryouji Fukuyama

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Kudamatsu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching processing method
- Patent number 7,122,479
- Issue date Oct 17, 2006
- Hitachi High-Technologies Corporation
- Yutaka Ohmoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching aftertreatment method
- Patent number 7,026,252
- Issue date Apr 11, 2006
- Hitachi High-Technologies Corporation
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of dry etching a sample and dry etching system
- Patent number 7,009,714
- Issue date Mar 7, 2006
- Hitachi High-Technologies Corporation
- Yutaka Ohmoto
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method of dry etching a sample and dry etching system
- Publication number 20040165193
- Publication date Aug 26, 2004
- Yutaka Ohmoto
- G01 - MEASURING TESTING
Information Patent Application
Etching aftertreatment method
- Publication number 20040147130
- Publication date Jul 29, 2004
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching processing method
- Publication number 20030234238
- Publication date Dec 25, 2003
- Yutaka Ohmoto
- H01 - BASIC ELECTRIC ELEMENTS