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Ryouji Hamasaki
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Hikari, JP
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last 30 patents
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Patent Grant
Method and apparatus for treating surface of semiconductor
Patent number
6,849,191
Issue date
Feb 1, 2005
Hitachi, Ltd.
Tetsuo Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for treating surface of semiconductor
Patent number
6,767,838
Issue date
Jul 27, 2004
Hitachi, Ltd.
Tetsuo Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum treatment system and its stage
Patent number
6,235,146
Issue date
May 22, 2001
Hitachi, Ltd.
Masanori Kadotani
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Plasma processing method
Publication number
20020125207
Publication date
Sep 12, 2002
Tetsuo Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...