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Ryoya ABE

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  • Miyagi, JP
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Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240112891
    • Publication date Apr 4, 2024
    • TOKYO ELECTRON LIMITED
    • Masaru ISAGO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230317425
    • Publication date Oct 5, 2023
    • TOKYO ELECTRON LIMITED
    • Ryoya ABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20220301832
    • Publication date Sep 22, 2022
    • TOKYO ELECTRON LIMITED
    • Takashi Aramaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220148861
    • Publication date May 12, 2022
    • TOKYO ELECTRON LIMITED
    • Wataru SHIMIZU
    • H01 - BASIC ELECTRIC ELEMENTS