Ryozo Hiraga

Person

Kanaga, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer position detecting method and apparatus
- Patent number 4,806,773
- Issue date Feb 21, 1989
- Canon Kabushiki Kaisha
- Ryozo Hiraga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer handling apparatus and method
- Patent number 4,789,294
- Issue date Dec 6, 1988
- Canon Kabushiki Kaisha
- Mitsuya Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for and method of aligning two bodies
- Patent number 4,553,845
- Issue date Nov 19, 1985
- Canon Kabushiki Kaisha
- Yoichi Kuroki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment mark detecting apparatus and method
- Patent number 4,545,684
- Issue date Oct 8, 1985
- Canon Kabushiki Kaisha
- Yoichi Kuroki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of aligning a mask and a wafer for manufacturing semiconduct...
- Patent number 4,530,604
- Issue date Jul 23, 1985
- Canon Kabushiki Kaisha
- Kazuhisa Okutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for processing a signal for aligning
- Patent number 4,515,481
- Issue date May 7, 1985
- Canon Kabushiki Kaisha
- Yasuyoshi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for detecting a signal for aligning two bodies and signal _p...
- Patent number 4,504,148
- Issue date Mar 12, 1985
- Canon Kabushiki Kaisha
- Yoichi Kuroki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for processing a signal for alignment
- Patent number 4,487,505
- Issue date Dec 11, 1984
- Canon Kabushiki Kaisha
- Shigeki Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Printing apparatus
- Patent number 4,440,493
- Issue date Apr 3, 1984
- Canon Kabushiki Kaisha
- Ryozo Hiraga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus for mask and wafer used in manufacturing semico...
- Patent number 4,315,201
- Issue date Feb 9, 1982
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment device
- Patent number 4,301,363
- Issue date Nov 17, 1981
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Alignment apparatus
- Patent number 4,278,893
- Issue date Jul 14, 1981
- Canon Kabushiki Kaisha
- Yuzo Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus
- Patent number 4,275,306
- Issue date Jun 23, 1981
- Canon Kabushiki Kaisha
- Yuzo Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photo-electrical detecting apparatus
- Patent number 4,262,208
- Issue date Apr 14, 1981
- Canon Kabushiki Kaisha
- Akiyoshi Suzki
- G02 - OPTICS
Information Patent Grant
Photoelectric detecting apparatus
- Patent number 4,202,627
- Issue date May 13, 1980
- Canon Kabushiki Kaisha
- Akiyoshi Suzki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ryozo Hiraga

Person

Patents Grantslast 30 patents

Wafer position detecting method and apparatus

Wafer handling apparatus and method

Device for and method of aligning two bodies

Alignment mark detecting apparatus and method

Method of aligning a mask and a wafer for manufacturing semiconduct...

Apparatus for processing a signal for aligning

System for detecting a signal for aligning two bodies and signal _p...

Apparatus for processing a signal for alignment

Printing apparatus

Alignment apparatus for mask and wafer used in manufacturing semico...

Alignment device

Alignment apparatus

Alignment apparatus

Photo-electrical detecting apparatus

Photoelectric detecting apparatus