Ryuichi Ebinuma

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of supporting and adjusting optical element in exposure appa...
- Patent number 7,136,238
- Issue date Nov 14, 2006
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G02 - OPTICS
Information Patent Grant
Supporting structure of optical element, exposure apparatus having...
- Patent number 7,113,263
- Issue date Sep 26, 2006
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G02 - OPTICS
Information Patent Grant
Supporting structure of optical element, exposure apparatus having...
- Patent number 6,867,848
- Issue date Mar 15, 2005
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G02 - OPTICS
Information Patent Grant
Driving device and exposure apparatus
- Patent number 6,750,947
- Issue date Jun 15, 2004
- Canon Kabushiki Kaisha
- Hiroyuki Tomita
- G02 - OPTICS
Information Patent Grant
Stage system and stage driving method for use in exposure apparatus
- Patent number 6,570,645
- Issue date May 27, 2003
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage system for exposure apparatus and device manufacturing method...
- Patent number 6,396,566
- Issue date May 28, 2002
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Linear motor and stage system, and scanning exposure apparatus usin...
- Patent number 6,252,314
- Issue date Jun 26, 2001
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection and exposure apparatus including an optical member and a...
- Patent number 6,144,504
- Issue date Nov 7, 2000
- Canon Kabushiki Kaisha
- Yuji Sudoh
- G02 - OPTICS
Information Patent Grant
Exposure apparatus
- Patent number 6,133,982
- Issue date Oct 17, 2000
- Canon Kabushiki Kaisha
- Mitsuru Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure method and apparatus for controlling acceleration...
- Patent number 6,040,893
- Issue date Mar 21, 2000
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and linear motor, and exposure apparatus and device...
- Patent number 6,037,680
- Issue date Mar 14, 2000
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflecting system
- Patent number 5,975,709
- Issue date Nov 2, 1999
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 5,933,215
- Issue date Aug 3, 1999
- Canon Kabushiki Kaisha
- Mitsuru Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 5,930,324
- Issue date Jul 27, 1999
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scan exposure method and apparatus
- Patent number 5,917,580
- Issue date Jun 29, 1999
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and linear motor, and exposure apparatus and device...
- Patent number 5,841,250
- Issue date Nov 24, 1998
- Canon Kabushiki Kaisha
- Nobushige Korenage
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and projection exposure apparatus using the same
- Patent number 5,822,043
- Issue date Oct 13, 1998
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical structure and device manufacturing method using the same
- Patent number 5,822,133
- Issue date Oct 13, 1998
- Canon Kabushiki Kaisha
- Makoto Mizuno
- G02 - OPTICS
Information Patent Grant
Alignment apparatus and SOR X-ray exposure apparatus having same
- Patent number 5,822,389
- Issue date Oct 13, 1998
- Canon Kabushiki Kaisha
- Shunichi Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask, method of producing a device using the mask and aligner with...
- Patent number 5,800,949
- Issue date Sep 1, 1998
- Canon Kabushiki Kaisha
- Ryo Edo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 5,796,469
- Issue date Aug 18, 1998
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Recording apparatus and ink cartridge
- Patent number 5,760,802
- Issue date Jun 2, 1998
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Mounting method
- Patent number 5,687,947
- Issue date Nov 18, 1997
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
SOR exposure system and mask manufactured thereby
- Patent number 5,623,529
- Issue date Apr 22, 1997
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask manufacturing method and apparatus and device manufacturing me...
- Patent number 5,593,800
- Issue date Jan 14, 1997
- Canon Kabushiki Kaisha
- Hidehiko Fujioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature controlling device for mask and wafer holders
- Patent number 5,577,552
- Issue date Nov 26, 1996
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G05 - CONTROLLING REGULATING
Information Patent Grant
Recording apparatus having an ink mist evacuation system
- Patent number 5,552,812
- Issue date Sep 3, 1996
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Movable stage mechanism and exposure apparatus using the same
- Patent number 5,537,186
- Issue date Jul 16, 1996
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Alignment apparatus and SOR x-ray exposure apparatus having same
- Patent number 5,524,131
- Issue date Jun 4, 1996
- Canon Kabushiki Kaisha
- Shunichi Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Recording apparatus and ink cartridge
- Patent number 5,467,114
- Issue date Nov 14, 1995
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS

Patents Applicationslast 30 patents

Information Patent Application
Supporting structure of optical element, exposure apparatus having...
- Publication number 20050046815
- Publication date Mar 3, 2005
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G02 - OPTICS
Information Patent Application
Method of supporting and adjusting optical element in exposure appa...
- Publication number 20040105177
- Publication date Jun 3, 2004
- Ryuichi Ebinuma
- G02 - OPTICS
Information Patent Application
Stage system and stage driving method for use in exposure apparatus
- Publication number 20030098966
- Publication date May 29, 2003
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE SYSTEM AND STAGE DRIVING METHOD FOR USE IN EXPOSURE APPARATUS
- Publication number 20020145721
- Publication date Oct 10, 2002
- NOBUSHIGE KORENAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE SYSTEM FOR EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD...
- Publication number 20020003616
- Publication date Jan 10, 2002
- RYUICHI EBINUMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Supporting structure of optical element, exposure apparatus having...
- Publication number 20010039126
- Publication date Nov 8, 2001
- Ryuichi Ebinuma
- G02 - OPTICS

Ryuichi Ebinuma

Person

Patents Grantslast 30 patents

Method of supporting and adjusting optical element in exposure appa...

Supporting structure of optical element, exposure apparatus having...

Supporting structure of optical element, exposure apparatus having...

Driving device and exposure apparatus

Stage system and stage driving method for use in exposure apparatus

Stage system for exposure apparatus and device manufacturing method...

Linear motor and stage system, and scanning exposure apparatus usin...

Projection and exposure apparatus including an optical member and a...

Exposure apparatus

Scanning exposure method and apparatus for controlling acceleration...

Stage apparatus and linear motor, and exposure apparatus and device...

Reflecting system

Exposure apparatus and device manufacturing method using the same

Exposure apparatus and device manufacturing method using the same

Scan exposure method and apparatus

Stage apparatus and linear motor, and exposure apparatus and device...

Exposure method and projection exposure apparatus using the same

Optical structure and device manufacturing method using the same

Alignment apparatus and SOR X-ray exposure apparatus having same

Mask, method of producing a device using the mask and aligner with...

Exposure apparatus and device manufacturing method using the same

Recording apparatus and ink cartridge

Mounting method

SOR exposure system and mask manufactured thereby

Mask manufacturing method and apparatus and device manufacturing me...

Temperature controlling device for mask and wafer holders

Recording apparatus having an ink mist evacuation system

Movable stage mechanism and exposure apparatus using the same

Alignment apparatus and SOR x-ray exposure apparatus having same

Recording apparatus and ink cartridge

Patents Applicationslast 30 patents

Supporting structure of optical element, exposure apparatus having...

Method of supporting and adjusting optical element in exposure appa...

Stage system and stage driving method for use in exposure apparatus

STAGE SYSTEM AND STAGE DRIVING METHOD FOR USE IN EXPOSURE APPARATUS

STAGE SYSTEM FOR EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD...

Supporting structure of optical element, exposure apparatus having...