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Exposure method and apparatus
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Patent number 5,008,702
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Issue date Apr 16, 1991
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Hitachi, Ltd.
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Tsutomu Tanaka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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X-ray lithography apparatus
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Patent number 4,852,133
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Issue date Jul 25, 1989
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Hitachi, Ltd.
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Minoru Ikeda
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Light-exposure apparatus
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Patent number 4,666,291
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Issue date May 19, 1987
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Hitachi, Ltd.
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Motoya Taniguchi
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY