Ryuichi FUNATSU

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus
- Patent number 8,193,493
- Issue date Jun 5, 2012
- Hitachi High-Technologies Corporation
- Sayaka Tanimoto
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,906,761
- Issue date Mar 15, 2011
- Hitachi High-Technologies Corporation
- Sayaka Tanimoto
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus
- Patent number 7,880,143
- Issue date Feb 1, 2011
- Hitachi High-Technologies Corporation
- Sayaka Tanimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,855,363
- Issue date Dec 21, 2010
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,425,704
- Issue date Sep 16, 2008
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection apparatus using electron beam
- Patent number 7,271,385
- Issue date Sep 18, 2007
- Hitachi High-Technologies Corporation
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,081,625
- Issue date Jul 25, 2006
- Hitachi High-Technologies Corporation
- Masanari Furiki
- G01 - MEASURING TESTING
Information Patent Grant
Circuit pattern inspection method and its apparatus
- Patent number 7,071,468
- Issue date Jul 4, 2006
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,034,298
- Issue date Apr 25, 2006
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection of circuit patterns for defects and analysis of defects...
- Patent number 6,566,654
- Issue date May 20, 2003
- Hitachi, Ltd.
- Ryuichi Funatsu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20110139985
- Publication date Jun 16, 2011
- Hitachi High-Technologies Corporation
- Sayaka TANIMOTO
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS
- Publication number 20100133433
- Publication date Jun 3, 2010
- Sayaka TANIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR INSPECTING A SUBSTRATE, A METHOD OF INSPECTING A SUBS...
- Publication number 20090309022
- Publication date Dec 17, 2009
- Hitachi High-Technologies Corporation
- Yasuhiro GUNJI
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20090045338
- Publication date Feb 19, 2009
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20080230697
- Publication date Sep 25, 2008
- Sayaka TANIMOTO
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20060192117
- Publication date Aug 31, 2006
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method and inspection apparatus using electron beam
- Publication number 20060076490
- Publication date Apr 13, 2006
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20050194536
- Publication date Sep 8, 2005
- Masanari Furiki
- G01 - MEASURING TESTING
Information Patent Application
Circuit pattern inspection method and its apparatus
- Publication number 20050109938
- Publication date May 26, 2005
- Hiroshi Miyai
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus using electron beam
- Publication number 20050040331
- Publication date Feb 24, 2005
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20040188609
- Publication date Sep 30, 2004
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20040129879
- Publication date Jul 8, 2004
- Masanari Furiki
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus using electron beam
- Publication number 20040026633
- Publication date Feb 12, 2004
- Yasuhiro Gunji
- G01 - MEASURING TESTING

Ryuichi FUNATSU

Person

Patents Grantslast 30 patents

Charged particle beam apparatus

Charged particle beam apparatus

Electron beam apparatus

Inspection method and apparatus using an electron beam

Inspection method and apparatus using an electron beam

Inspection method and inspection apparatus using electron beam

Charged particle beam apparatus

Circuit pattern inspection method and its apparatus

Inspection method and apparatus using an electron beam

Inspection of circuit patterns for defects and analysis of defects...

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM APPARATUS

ELECTRON BEAM APPARATUS

APPARATUS FOR INSPECTING A SUBSTRATE, A METHOD OF INSPECTING A SUBS...

Inspection method and apparatus using an electron beam

CHARGED PARTICLE BEAM APPARATUS

Inspection method and apparatus using an electron beam

Inspection method and inspection apparatus using electron beam

Charged particle beam apparatus

Circuit pattern inspection method and its apparatus

Inspection method and inspection apparatus using electron beam

Inspection method and apparatus using an electron beam

Charged particle beam apparatus

Inspection method and inspection apparatus using electron beam