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Sagamihara-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Exposure apparatus, exposure method, method for producing device, a...
Patent number
10,088,760
Issue date
Oct 2, 2018
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
Patent number
9,618,854
Issue date
Apr 11, 2017
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
Patent number
9,335,639
Issue date
May 10, 2016
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, method for producing device, a...
Patent number
9,182,685
Issue date
Nov 10, 2015
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, method for producing device, a...
Patent number
9,019,469
Issue date
Apr 28, 2015
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element, exposure apparatus based on the use of the same, e...
Patent number
8,724,075
Issue date
May 13, 2014
Nikon Corporation
Takao Kokubun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
Patent number
8,064,039
Issue date
Nov 22, 2011
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, method for producing device, a...
Patent number
8,054,447
Issue date
Nov 8, 2011
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element, exposure apparatus based on the use of the same, e...
Patent number
7,812,926
Issue date
Oct 12, 2010
Nikon Corporation
Takao Kokubun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR PRODUCING DEVICE, A...
Publication number
20180364581
Publication date
Dec 20, 2018
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Publication number
20160246184
Publication date
Aug 25, 2016
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR PRODUCING DEVICE, A...
Publication number
20150286151
Publication date
Oct 8, 2015
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR PRODUCING DEVICE, A...
Publication number
20140022523
Publication date
Jan 23, 2014
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Maintenance Method, Exposure Method, Exposure Apparatus, and Method...
Publication number
20120307220
Publication date
Dec 6, 2012
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method, exposure apparatus, and device manufacturing method
Publication number
20120044469
Publication date
Feb 23, 2012
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical element, exposure apparatus based on the use of the same, e...
Publication number
20110013160
Publication date
Jan 20, 2011
Nikon Corporation
Takao Kokubun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Maintenance Method, Exposure Method, Exposure Apparatus, And Method...
Publication number
20070285634
Publication date
Dec 13, 2007
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure Apparatus, Exposure Method, Method for Producing Device, a...
Publication number
20070242242
Publication date
Oct 18, 2007
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical element, exposure apparatus based on the use of the same, e...
Publication number
20070201011
Publication date
Aug 30, 2007
Nikon Corporation
Takao Kokubun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method, exposure apparatus, and device manufacturing method
Publication number
20070139632
Publication date
Jun 21, 2007
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, exposure method, method for producing device, a...
Publication number
20070115450
Publication date
May 24, 2007
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY