Ryuichi MATSUDA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Solid state laser apparatus
- Patent number 11,322,903
- Issue date May 3, 2022
- Mitsubishi Heavy Industries, Ltd.
- Koichi Hamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid-state laser device
- Patent number 11,063,403
- Issue date Jul 13, 2021
- Mitsubishi Heavy Industries, Ltd.
- Koichi Hamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generation apparatus including measurement device and plasma...
- Patent number 10,616,989
- Issue date Apr 7, 2020
- Mitsubishi Heavy Industries, Ltd.
- Tatsufumi Aoi
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Input coupler for accelerating cavity and accelerator
- Patent number 10,292,252
- Issue date May 14, 2019
- MITSUBISHI HEAVY INDUSTRIES MACHINERY SYSTEMS, LTD.
- Kazunori Okihira
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser oscillation device
- Patent number 10,164,397
- Issue date Dec 25, 2018
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directed-energy irradiating apparatus
- Patent number 9,263,848
- Issue date Feb 16, 2016
- Mitsubishi Heavy Industries, Ltd.
- Shingo Nishikata
- F41 - WEAPONS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,011,634
- Issue date Apr 21, 2015
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,960,124
- Issue date Feb 24, 2015
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Directed-energy irradiating apparatus
- Patent number 8,908,720
- Issue date Dec 9, 2014
- Mitsubishi Heavy Industries, Ltd.
- Shingo Nishikata
- F41 - WEAPONS
Information Patent Grant
Plasma processing apparatus, plasma processing method, plasma film...
- Patent number 8,662,010
- Issue date Mar 4, 2014
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,480,912
- Issue date Jul 9, 2013
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Barrier metal film production apparatus, barrier metal film product...
- Patent number 7,977,243
- Issue date Jul 12, 2011
- Canon Anelva Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier metal film production method
- Patent number 7,659,209
- Issue date Feb 9, 2010
- Canon Anelva Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal film production apparatus
- Patent number 7,588,799
- Issue date Sep 15, 2009
- Canon Anelva Corporation
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Power supply antenna and power supply method
- Patent number 7,520,246
- Issue date Apr 21, 2009
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for measuring wafer potential or temperature
- Patent number 7,335,315
- Issue date Feb 26, 2008
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and its manufacturing method
- Patent number 7,283,346
- Issue date Oct 16, 2007
- Mitsubishi Heavy Industries, Ltd.
- Kazuto Yoshida
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for producing a superconductor of an immiscible alloy and it...
- Patent number 4,985,401
- Issue date Jan 15, 1991
- Aisin Seiki Kabushiki Kaisha
- Akira Sawaoka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SOLID STATE LASER APPARATUS
- Publication number 20200194956
- Publication date Jun 18, 2020
- Mitsubishi Heavy Industries, Ltd.
- Koichi HAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INPUT COUPLER FOR ACCELERATING CAVITY AND ACCELERATOR
- Publication number 20190008028
- Publication date Jan 3, 2019
- MITSUBISHI HEAVY INDUSTRIES, MACHINERY SYSTEMS, LTD.
- Kazunori OKIHIRA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SOLID-STATE LASER DEVICE
- Publication number 20180233874
- Publication date Aug 16, 2018
- Mitsubishi Heavy Industries, Ltd.
- Koichi HAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER OSCILLATION DEVICE
- Publication number 20180083408
- Publication date Mar 22, 2018
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi MATSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATION APPARATUS INCLUDING MEASUREMENT DEVICE AND PLASMA...
- Publication number 20170064806
- Publication date Mar 2, 2017
- Mitsubishi Heavy Industries, Ltd.
- Tatsufumi AOI
- G01 - MEASURING TESTING
Information Patent Application
DIRECTED-ENERGY IRRADIATING APPARATUS
- Publication number 20140153592
- Publication date Jun 5, 2014
- Shingo NISHIKATA
- F41 - WEAPONS
Information Patent Application
DIRECTED-ENERGY IRRADIATING APPARATUS
- Publication number 20140153593
- Publication date Jun 5, 2014
- Shingo NISHIKATA
- F41 - WEAPONS
Information Patent Application
INDUCTIVELY COUPLED PLASMA GENERATION DEVICE
- Publication number 20130088146
- Publication date Apr 11, 2013
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20130025790
- Publication date Jan 31, 2013
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20120135164
- Publication date May 31, 2012
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS EXHAUST STRUCTURE, AND APPARATUS AND METHOD FOR PLASMA PROCESSING
- Publication number 20120132619
- Publication date May 31, 2012
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20120125891
- Publication date May 24, 2012
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURE OF SUBSTRATE SUPPORTING TABLE, AND PLASMA PROCESSING APPA...
- Publication number 20120111502
- Publication date May 10, 2012
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT STAGE OF PLASMA PROCESSING APPARATUS
- Publication number 20110297321
- Publication date Dec 8, 2011
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE AT...
- Publication number 20110104363
- Publication date May 5, 2011
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA FILM FORMING APPARATUS
- Publication number 20100236482
- Publication date Sep 23, 2010
- Mitsubishi Heavy Industries, Ltd.
- Hidetaka Kafuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM PRODUCT...
- Publication number 20100124825
- Publication date May 20, 2010
- Canon ANELVA Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM PRODUCT...
- Publication number 20100047471
- Publication date Feb 25, 2010
- Canon ANELVA Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL FILM PRODUCTION APPARATUS
- Publication number 20090324848
- Publication date Dec 31, 2009
- Canon ANELVA Corporation
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20090127227
- Publication date May 21, 2009
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus
- Publication number 20080115728
- Publication date May 22, 2008
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Barrier metal film production method
- Publication number 20070272655
- Publication date Nov 29, 2007
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus, plasma processing method, plasma film...
- Publication number 20070224364
- Publication date Sep 27, 2007
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production apparatus, barrier metal film product...
- Publication number 20070141274
- Publication date Jun 21, 2007
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production apparatus, barrier metal film product...
- Publication number 20070117363
- Publication date May 24, 2007
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production apparatus, barrier metal film product...
- Publication number 20070087577
- Publication date Apr 19, 2007
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metal film production apparatus
- Publication number 20060110535
- Publication date May 25, 2006
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production apparatus, barrier metal film product...
- Publication number 20060054593
- Publication date Mar 16, 2006
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Power supply antenna and power supply method
- Publication number 20060027168
- Publication date Feb 9, 2006
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing system, plasma processing method, plasma film dep...
- Publication number 20050202183
- Publication date Sep 15, 2005
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ryuichi MATSUDA

Person

Patents Grantslast 30 patents

Solid state laser apparatus

Solid-state laser device

Plasma generation apparatus including measurement device and plasma...

Input coupler for accelerating cavity and accelerator

Laser oscillation device

Directed-energy irradiating apparatus

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Directed-energy irradiating apparatus

Plasma processing apparatus, plasma processing method, plasma film...

Plasma processing apparatus and plasma processing method

Barrier metal film production apparatus, barrier metal film product...

Barrier metal film production method

Metal film production apparatus

Power supply antenna and power supply method

Method and device for measuring wafer potential or temperature

Electrostatic chuck and its manufacturing method

Method for producing a superconductor of an immiscible alloy and it...

Patents Applicationslast 30 patents

SOLID STATE LASER APPARATUS

INPUT COUPLER FOR ACCELERATING CAVITY AND ACCELERATOR

SOLID-STATE LASER DEVICE

LASER OSCILLATION DEVICE

PLASMA GENERATION APPARATUS INCLUDING MEASUREMENT DEVICE AND PLASMA...

DIRECTED-ENERGY IRRADIATING APPARATUS

DIRECTED-ENERGY IRRADIATING APPARATUS

INDUCTIVELY COUPLED PLASMA GENERATION DEVICE

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

GAS EXHAUST STRUCTURE, AND APPARATUS AND METHOD FOR PLASMA PROCESSING

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

STRUCTURE OF SUBSTRATE SUPPORTING TABLE, AND PLASMA PROCESSING APPA...

SUBSTRATE SUPPORT STAGE OF PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE AT...

PLASMA FILM FORMING APPARATUS

BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM PRODUCT...

BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM PRODUCT...

METAL FILM PRODUCTION APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Plasma Processing Apparatus

Barrier metal film production method

Plasma processing apparatus, plasma processing method, plasma film...

Barrier metal film production apparatus, barrier metal film product...

Barrier metal film production apparatus, barrier metal film product...

Barrier metal film production apparatus, barrier metal film product...

Metal film production apparatus

Barrier metal film production apparatus, barrier metal film product...

Power supply antenna and power supply method

Plasma processing system, plasma processing method, plasma film dep...