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Ryuichi Miura
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Chiba-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Method and device for ion implanting
Patent number
6,617,594
Issue date
Sep 9, 2003
Applied Materials, Inc.
Yoshihiko Fujiki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer holder of ion implantation apparatus
Patent number
6,545,267
Issue date
Apr 8, 2003
Applied Materials, Inc.
Ryuichi Miura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Ion implantation apparatus and insulating bushing therefor
Publication number
20020158213
Publication date
Oct 31, 2002
Yasuhiko Matsunaga
H01 - BASIC ELECTRIC ELEMENTS